[1] [1] Angela Duparré, Stefan Jakobs, Norbert Kaiser. Influence of substrate surface and film roughness on the quality of optical coatings for the UV spectral region [C]. SPIE, 1997, 3110: 509～516

[2] [2] Alexander V. Tikhonravov, Michael K. Trubetskov, Andrei A. Tikhonravov et al.. Effects of interface roughness on the spectral properties of thin films and multilayers [J]. Appl. Opt., 2003, 42(25): 5140～5148

[3] [3] Rebecca S. Retherford, Robert Sabia, Vincent P. Sokira. Effect of surface quality on transmission performance for (111)CaF2 [J]. Appl. Surf. Sci., 2001, 183(3-4): 264～269

[4] [4] T. G. Mathia, P. Pawlus, M. Wieczorowski. Recent trend in surface metrology [J]. Wear, 2001, 271(3-4): 494～508

[5] [5] Li Jianbai, Li Dacheng, Li Xiaoyun et al.. Study on testing method for microprofile of optical supersmooth surface [J]. Acta Optica Sinica, 2000, 20(11): 1533～1537

[6] [6] P. Pawlus, D. G. Chetwynd. Effcient characterization of surface topography in cylinder bores [J]. Precision Engng., 1996, 19(2-3): 164～174

[7] [7] T. R. Thomas, B.-G. Rosen. Determination of the optimum sampling interval for rough contact mechanics [J]. Tribol. Int., 2000, 33(9): 601～610

[8] [8] L. Blunt, S. Ebdon. The application of three-dimensional surafce measurement techniques to characterizing grinding wheel topography [J]. Int. J. Mach. Tools Manufact., 1996, 36(11): 1207～1226

[9] [9] W. P. Dong, E. Mainsah, K. J. Stout. Determination of appropriate sampling conditions for three-dimensional microtopography measurement [J]. Int. J. Mach. Tools Manufact., 1996, 36(12): 1347～1362

[10] [10] Pawel Pawlus. Digitisation of surface topography measurement results [J]. Measurement, 2007, 40(6): 672～686

[11] [11] Saudi Standard Draft. A Guide to Expression of Uncertainty in Measurement [S]. 2006, NO.13

[12] [12] James E. Bartlett, Joe W. Kotrlik, Chadwick C. Higgins. Organizational research: determining appropriate sample size in survey research [J]. Information Technology,Learning,and Performance Journal, 2001, 19(1): 43～50

[13] [13] B.-G.Rosen, J. Garnier. Uncertainties and optimized sampling in surface roughness characterization [J]. Wear, 2011, 271(3-4): 610～615

[14] [14] Angela Duparre, Josep Ferre-Borrull, Stefan Gliech et al.. Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components [J]. Appl. Opt., 2002, 41(1): 154～169

[15] [15] Pawel Pawlus. Mechanical filtration of surface profiles [J]. Measurement, 2004, 35(4): 325～341

[16] [16] Jiunn-Jong Wu. Spectral analysis for the effect of stylus tip curvature on measuring rough surfaces [J]. Wear, 1999, 230(2): 194～200

[17] [17] M. Wieczorowski, A. Cellary, R. Majchrowski. The analysis of credibility and reproducibility of surface roughness measurement results [J]. Wear, 2010, 269(5-6): 480～484

[18] [18] ISO12781-2. Geometrical Product Specifications(GPS)-Flatness-Extraction Strategies [S]. 2003(E)