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Chinese Journal of Lasers, Volume. 38, Issue 11, 1108003(2011)

Testing Method for Optical Supersmooth Substrate Surface by Atomic Force Microscopy

Jin Jingcheng1,2、*, Jin Chunshui1, Deng Wenyuan1, and Yu Bo1
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    Jin Jingcheng, Jin Chunshui, Deng Wenyuan, Yu Bo. Testing Method for Optical Supersmooth Substrate Surface by Atomic Force Microscopy[J]. Chinese Journal of Lasers, 2011, 38(11): 1108003

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    Paper Information

    Category: measurement and metrology

    Received: Jun. 15, 2011

    Accepted: --

    Published Online: Oct. 27, 2011

    The Author Email: Jingcheng Jin (jjcheng@126.com)

    DOI:10.3788/cjl201138.1108003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology