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Acta Optica Sinica, Volume. 18, Issue 12, 1697(1998)

Study on Drift of Nonlinearity in Nanometer Precision Heterodyne Interferometers

[in Chinese]1, [in Chinese]1, and [in Chinese]2
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  • 1[in Chinese]
  • 2[in Chinese]
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    [1] [1] A. E. Rosenbluth, N. Bobroff. Optical sources of nonlinearity in heterodyne interferometers. Precis. Engng., 1990, 12(1): 7～11

    [3] [3] Wenmei Hou, Gunter Wilkening. Investigation and compensation of the nonlinearity of heterodyne interferometers. Precis. Engng., 1992, 14(2): 91～98

    [4] [4] Wenmei Hou,Xianbin Zhao. Drift of nonlinearity in the heterodyne interferometer. Precis. Engng., 1994, 16(1): 25～35

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    [2] Lin Haoshan, Chen Juke, Li Yuhe, Li Qingxiang, Pan Fudong, Wang Lihu. Error Analysis of Optical Frequency Mixing on Detecting Device for Superfinish Surface Scratch[J]. Laser & Optoelectronics Progress, 2015, 52(2): 21203

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    [in Chinese], [in Chinese], [in Chinese]. Study on Drift of Nonlinearity in Nanometer Precision Heterodyne Interferometers[J]. Acta Optica Sinica, 1998, 18(12): 1697

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jun. 9, 1997

    Accepted: --

    Published Online: Oct. 18, 2006

    The Author Email:

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology