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Acta Optica Sinica, Volume. 18, Issue 12, 1697(1998)

Study on Drift of Nonlinearity in Nanometer Precision Heterodyne Interferometers

[in Chinese]1, [in Chinese]1, and [in Chinese]2
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  • 2[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese]. Study on Drift of Nonlinearity in Nanometer Precision Heterodyne Interferometers[J]. Acta Optica Sinica, 1998, 18(12): 1697

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jun. 9, 1997

    Accepted: --

    Published Online: Oct. 18, 2006

    The Author Email:

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology