Chinese Journal of Lasers, Volume. 49, Issue 24, 2401003(2022)

SiC Visible Light Blindness UV Avalanche Photodiodes

Chengdong Yang, Linlin Su*, Kaipeng Xia, and Wenye Ma
Author Affiliations
  • School of Electronic Information Engineering, Wuxi University, Wuxi 214105, Jiangsu, China
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    References(23)

    [1] Wang Y, Qian Y S, Kong X Y. Photon counting based on solar-blind ultraviolet intensified complementary metal-oxide-semiconductor (ICMOS) for corona detection[J]. IEEE Photonics Journal, 10, 1-19(2018).

    [2] Zhao Y R, Cao N W, Jia P C et al. Simultaneous observation of ozone and aerosol via ultraviolet multi-wavelength lidar[J]. Laser & Optoelectronics Progress, 59, 1601001(2022).

    [3] Yuan Z L, Hu Y J, Lü J H et al. Characteristics of ZnO nanowire arrays/PVK heterojunction ultraviolet photodetector[J]. Acta Optica Sinica, 42, 2204001(2022).

    [4] Sun L Q, Wang D K, Fang D et al. Quantum dots modified ZnO based fast-speed response ultraviolet photodetector[J]. Chinese Journal of Lasers, 49, 1303001(2022).

    [5] Wang J, Luo L B. Advances in Ga2O3-based solar-blind ultraviolet photodetectors[J]. Chinese Journal of Lasers, 48, 1100001(2021).

    [6] Pau J L, McClintock R, Minder K et al. Geiger-mode operation of back-illuminated GaN avalanche photodiodes[J]. Applied Physics Letters, 91, 041104(2007).

    [7] Cicek E, Vashaei Z, McClintock R et al. Geiger-mode operation of ultraviolet avalanche photodiodes grown on sapphire and free-standing GaN substrates[J]. Applied Physics Letters, 96, 261107(2010).

    [8] Shen S C, Zhang Y, Yoo D W et al. Performance of deep ultraviolet GaN avalanche photodiodes grown by MOCVD[J]. IEEE Photonics Technology Letters, 19, 1744-1746(2007).

    [9] Su L L, Zhou D, Lu H et al. Recent progress of SiC UV single photon counting avalanche photodiodes[J]. Journal of Semiconductors, 40, 65-75(2019).

    [10] Vert A, Soloviev S, Sandvik P. SiC avalanche photodiodes and photomultipliers for ultraviolet and solar-blind light detection[J]. Physica Status Solidi (a), 206, 2468-2477(2009).

    [11] Bai X G, Liu H D, McIntosh D C et al. High-detectivity and high-single-photon-detection-efficiency 4H-SiC avalanche photodiodes[J]. IEEE Journal of Quantum Electronics, 45, 300-303(2009).

    [12] Zhou D, Liu F, Lu H et al. High-temperature single photon detection performance of 4H-SiC avalanche photodiodes[J]. IEEE Photonics Technology Letters, 26, 1136-1138(2014).

    [13] Li L H, Zhou D, Lu H et al. 4H-SiC avalanche photodiode linear array operating in Geiger mode[J]. IEEE Photonics Journal, 9, 6804207(2017).

    [14] Zhou X Y, Tan X, Wang Y G et al. High-performance 4H-SiC p-i-n ultraviolet avalanche photodiodes with large active area[J]. Chinese Optics Letters, 17, 090401(2019).

    [15] Guo X Y, Beck A L, Li X W et al. Study of reverse dark current in 4H-SiC avalanche photodiodes[J]. IEEE Journal of Quantum Electronics, 41, 562-567(2005).

    [16] Maimon S, Wicks G W. nBn detector, an infrared detector with reduced dark current and higher operating temperature[J]. Applied Physics Letters, 89, 151109(2006).

    [17] Ji X L, Liu B Q, Xu Y et al. Deep-level traps induced dark currents in extended wavelength InxGa1-xAs/InP photodetector[J]. Journal of Applied Physics, 114, 224502(2013).

    [18] Yang S, Zhou D, Cai X L et al. Analysis of dark count mechanisms of 4H-SiC ultraviolet avalanche photodiodes working in Geiger mode[J]. IEEE Transactions on Electron Devices, 64, 4532-4539(2017).

    [19] Su L L, Zhou D, Liu Q et al. Effect of a single threading dislocation on electrical and single photon detection characteristics of 4H-SiC ultraviolet avalanche photodiodes[J]. Chinese Physics Letters, 37, 068502(2020).

    [20] Zhou X Y, Tan X, Lü Y J et al. Single-photon-counting performance of 4H-SiC avalanche photodiodes with a wide-range incident flux[J]. IEEE Photonics Technology Letters, 32, 847-850(2020).

    [21] Zhou X Y, Tan X, Lü Y J et al. 128-pixel arrays of 4H-SiC UV APD with dual-frequency PECVD SiNx passivation[J]. Optics Express, 28, 29245-29252(2020).

    [22] Zhou X Y, Li J, Lu W L et al. Large-area 4H-SiC avalanche photodiodes with high gain and low dark current for visible-blind ultraviolet detection[J]. Chinese Optics Letters, 16, 060401(2018).

    [23] Cha H Y, Soloviev S, Zelakiewicz S et al. Temperature dependent characteristics of nonreach-through 4H-SiC separate absorption and multiplication APDs for UV detection[J]. IEEE Sensors Journal, 8, 233-237(2008).

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    Chengdong Yang, Linlin Su, Kaipeng Xia, Wenye Ma. SiC Visible Light Blindness UV Avalanche Photodiodes[J]. Chinese Journal of Lasers, 2022, 49(24): 2401003

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    Paper Information

    Category: laser devices and laser physics

    Received: Aug. 1, 2022

    Accepted: Sep. 22, 2022

    Published Online: Nov. 21, 2022

    The Author Email: Su Linlin (sulinlin@cwxu.edu.cn)

    DOI:10.3788/CJL202249.2401003

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