Journal of Synthetic Crystals, Volume. 54, Issue 4, 717(2025)

Preparation of 4-Inch High-Quality GaN Single Crystal Substrates

QI Zhanguo1, WANG Shouzhi1,2、*, LI Qiubo1, WANG Zhongxin1, SHAO Huihui1, LIU Lei1, WANG Guodong1, SUN Defu1, YU Huidong1, JIANG Kaize1, ZHANG Shuang1, CHEN Xiufang1, XU Xiangang1, and ZHANG Lei1,2
Author Affiliations
  • 1State Key Laboratory of Crystal Materials, Institute of Novel Semiconductors, Shandong University, Jinan 250100, China
  • 2Shandong Crystal GaN Semiconductor Co., Ltd., Jinan 250100, China
  • show less

    In this study, the porous substrate and stress control techniques were adopted to successfully break through the dislocation suppression and stress control problems in the growth of heterogeneous epitaxial GaN single crystals, and high-quality GaN single crystals with a diameter of 4-inch were prepared. After cutting, chamfering, grinding, and chemical-mechanical polishing, a damage-free, ultra-smooth 4-inch self-separating GaN single crystal substrate with a thickness of 500 μm was obtained. The substrate has both excellent crystalline quality and mechanical stability, with uniform surface color, no cracking phenomenon, and uniform stress distribution; cathodoluminescence spectroscopy (CL) measurements reveal a dislocation density of 9.6×105 cm-2, and the rocking curve of high-resolution X-ray diffraction (HRXRD) (002) is as low as 57.91″; the surface roughness Ra<0.2 nm measured by atomic force microscope (AFM), presenting atomic-level flat surface. The as-prepared substrate is ready-to-use, meeting the requirements for blue/green laser diodes and power electronic devices.

    Tools

    Get Citation

    Copy Citation Text

    QI Zhanguo, WANG Shouzhi, LI Qiubo, WANG Zhongxin, SHAO Huihui, LIU Lei, WANG Guodong, SUN Defu, YU Huidong, JIANG Kaize, ZHANG Shuang, CHEN Xiufang, XU Xiangang, ZHANG Lei. Preparation of 4-Inch High-Quality GaN Single Crystal Substrates[J]. Journal of Synthetic Crystals, 2025, 54(4): 717

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Apr. 2, 2025

    Accepted: Jun. 5, 2025

    Published Online: Jun. 5, 2025

    The Author Email: WANG Shouzhi (wangsz@sdu.edu.cn)

    DOI:10.16553/j.cnki.issn1000-985x.2025.4001

    Topics