Journal of Infrared and Millimeter Waves, Volume. 41, Issue 5, 888(2022)
On-site determination of optical constants for thin films
Fig. 1. Schematic diagram of on-site determination for the deposition system
Fig. 2. Calculation flow of the dielectric thin film optical constants,which equivalent interface is composed of thin film material deposited on a transparent substrate,with the parameter constraints imposed by the absorption loss of film
Fig. 3. (a)The transmission curve changed with the deposition thickness of Si film(monitor wavelength of 1300 nm)and(b)shows a zoom-in view of the Si transmission curve;(c)The transmission curve changed with the deposition thickness of Ta2O5 film(monitor wavelength of 890 nm)and(d)shows a zoom-in view of the Ta2O5 transmission curve;Blue dotted line,monitoring transmission curve;red solid line,fitting curve by LSM;cyan solid circles,monitoring transmission peaks;red inverted triangle,fitting curve peaks
Fig. 4. (a)transmission curve changed with the deposition thickness of SiO2 film(monitor wavelength of 1064 nm)and(b)shows a zoom-in view of the SiO2 transmission curve;The inset represents the glass substrate coating with a film stack of(HL)^4
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Mao-Bin XIE, Zhi-Yong WU, Heng-Yi CUI, Xin-Chao ZHAO, Zhi-Yi XUAN, Qing-Quan LIU, Feng LIU, Liao-Xin SUN, Shao-Wei WANG. On-site determination of optical constants for thin films[J]. Journal of Infrared and Millimeter Waves, 2022, 41(5): 888
Category: Research Articles
Received: Jul. 19, 2021
Accepted: --
Published Online: Feb. 6, 2023
The Author Email: Feng LIU (fliu@shnu.edu.cn), Shao-Wei WANG (wangshw@mail.sitp.ac.cn)