Journal of Infrared and Millimeter Waves, Volume. 41, Issue 5, 888(2022)

On-site determination of optical constants for thin films

Mao-Bin XIE1,3,4,5, Zhi-Yong WU1,2,3, Heng-Yi CUI1,3,4,5, Xin-Chao ZHAO1,3,4,5, Zhi-Yi XUAN1,4,5,6, Qing-Quan LIU1,4,5,6, Feng LIU2、*, Liao-Xin SUN1,3,5, and Shao-Wei WANG1,3,4,5,7、**
Author Affiliations
  • 1State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China
  • 2Department of Physics,Shanghai Normal University,Shanghai 200234,China
  • 3Shanghai Engineering Research Center of Energy-Saving Coatings,Shanghai 200083,China
  • 4Shanghai Research Center for Quantum Sciences,Shanghai 201315,China
  • 5University of Chinese Academy of Sciences,Beijing 100049,China
  • 6School of Physical Science and Technology,ShanghaiTech University,Shanghai 201210,China
  • 7Nantong Academy of Intelligent Sensing,Nantong 226000,China
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    Figures & Tables(5)
    Schematic diagram of on-site determination for the deposition system
    Calculation flow of the dielectric thin film optical constants,which equivalent interface is composed of thin film material deposited on a transparent substrate,with the parameter constraints imposed by the absorption loss of film
    (a)The transmission curve changed with the deposition thickness of Si film(monitor wavelength of 1300 nm)and(b)shows a zoom-in view of the Si transmission curve;(c)The transmission curve changed with the deposition thickness of Ta2O5 film(monitor wavelength of 890 nm)and(d)shows a zoom-in view of the Ta2O5 transmission curve;Blue dotted line,monitoring transmission curve;red solid line,fitting curve by LSM;cyan solid circles,monitoring transmission peaks;red inverted triangle,fitting curve peaks
    (a)transmission curve changed with the deposition thickness of SiO2 film(monitor wavelength of 1064 nm)and(b)shows a zoom-in view of the SiO2 transmission curve;The inset represents the glass substrate coating with a film stack of(HL)^4
    • Table 1. The optical constants of film materials at monitoring wavelengths

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      Table 1. The optical constants of film materials at monitoring wavelengths

      SampleMonitoring wavelength(nm)d (nm)nkSDF
      Si1300598.13.224.6×10-30.78%
      Ta2O5890500.12.061.3×10-30.12%
      SiO2106414041.466.6 ×10-50.02%
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    Mao-Bin XIE, Zhi-Yong WU, Heng-Yi CUI, Xin-Chao ZHAO, Zhi-Yi XUAN, Qing-Quan LIU, Feng LIU, Liao-Xin SUN, Shao-Wei WANG. On-site determination of optical constants for thin films[J]. Journal of Infrared and Millimeter Waves, 2022, 41(5): 888

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    Paper Information

    Category: Research Articles

    Received: Jul. 19, 2021

    Accepted: --

    Published Online: Feb. 6, 2023

    The Author Email: Feng LIU (fliu@shnu.edu.cn), Shao-Wei WANG (wangshw@mail.sitp.ac.cn)

    DOI:10.11972/j.issn.1001-9014.2022.05.013

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