Fig. 1. Single pulse energy change under constant high voltage working mode of excimer laser

Fig. 2. Schematic of single pulse energy simulation model of excimer laser

Fig. 3. Comparison of Burst's pulse energy change measured and model under the same working mode. (a) Measured Burst pulse energy; (b) model Burst pulse energy

Fig. 4. Control system of excimer laser based on reinforcement learning

Fig. 5. Comparison of light energy values. (a) Z-N parameter tuning PI algorithm; (b) PSO tuning PI algorithm; (c) algorithm based on reinforcement learning

Fig. 6. Comparison of algorithm single pulse energy histograms. (a) Z-N parameter tuning PI algorithm; (b) PSO tuning PI algorithm; (c) algorithm based on reinforcement learning

Fig. 7. Comparison of Burst energy stability. (a) Z-N parameter tuning PI algorithm; (b) PSO tuning PI algorithm; (c) algorithm based on reinforcement learning

Fig. 8. Comparison of Burst dose stability. (a) Z-N parameter tuning PI algorithm; (b) PSO tuning PI algorithm; (c) algorithm based on reinforcement learning

Fig. 9. Comparison of dynamic stability. (a) Z-N parameter tuning PI algorithm; (b) PSO tuning PI algorithm; (c) algorithm based on reinforcement learning