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Chinese Journal of Lasers, Volume. 47, Issue 9, 901002(2020)

Energy Control of Excimer Laser Based on Reinforcement Learning

Sun Zexu1,2, Feng Zebin1,2, Zhou Yi1,2, Liu Guangyi1,2, and Han Xiaoquan1,2、*
Author Affiliations
  • 1Optoelectronics Research and Development Center, Institute of Microelectronics of the Chinese Academy of Sciences,Beijing 100029, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    Sun Zexu, Feng Zebin, Zhou Yi, Liu Guangyi, Han Xiaoquan. Energy Control of Excimer Laser Based on Reinforcement Learning[J]. Chinese Journal of Lasers, 2020, 47(9): 901002

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    Paper Information

    Category: laser devices and laser physics

    Received: Feb. 21, 2020

    Accepted: --

    Published Online: Sep. 16, 2020

    The Author Email: Xiaoquan Han (hanxiaoquan@ime.ac.cn)

    DOI:10.3788/CJL202047.0901002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology