Journal of Synthetic Crystals, Volume. 51, Issue 1, 132(2022)
Process of Preparing High Sheet Resistance P-N Junction Emitter with Low Surface Phosphorus Doping Concentration
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LI Wang, TANG Lu, TIAN Yahui, XUE Fei, XIN Zengnian, PAN Shengjiang. Process of Preparing High Sheet Resistance P-N Junction Emitter with Low Surface Phosphorus Doping Concentration[J]. Journal of Synthetic Crystals, 2022, 51(1): 132
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Received: Aug. 19, 2021
Accepted: --
Published Online: Mar. 2, 2022
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CSTR:32186.14.
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