[2] [2] Yang M Ch. Researches on Oxygen Treatment of Hydrogen-termined Diamond and Sta-bility of Diamond Field Effect Transistors[D]. Changchun: Jilin University, 2020.

[3] [3] Huang L, Wang T, Li X X, et al. UV-to-IR highly transparent ultrathin diamond nanofilm - s with intriguing performances: Anti-fogging, self-cleaning and self-lubricating[J]. Applied Surface Science, 2020, Vol. 527: 146733.

[4] [4] Balmer RS, Brandon JR, Clewes S. L, et al. Chemical vapour deposition synthetic diamond-d: materials, technology and applications[J]. Journal of Physics: Condensed Matter, 2009, 21(36): 364221.

[5] [5] Coe SE, Sussmann RS. Optical, thermal and mechanical properties of CVD diamond[J]. Diamond and Related Materials, 2000, 9(9): 1726-1729.

[6] [6] Uhlmann E, Koenig J. CVD diamond coatings on geometrically complex cutting tools[J]. CIRP Annals, 2009, 58(1): 65-68.

[7] [7] Jung S, Lee Pa, Kim B H. Surface polishing of quartz-based microfluidic channels using CO2 laser[J]. Microfluidics and Nanofluidics, 2016, 20(6): 84.

[8] [8] Guillaume B. Dental implants: A review[J]. Morphologie, 2016, 100(331): 189-198.

[9] [9] Tsai Y C, Huang G M, Chen J H, et al. A feasibility study of the material re-moval rate of the conical end-face of the optical fiber under polishing[J]. Applied Mechanics and Materials, 2014, 518: 19-24.

[10] [10] Ukar E, Lamikiz A, Libana F, et al. An industrial approach of laser polishing with different laser sources: Industrielle Methode zum Laserpolieren mit verschiedenen Laserstrahlquellen[J]. Materialwissenschaft und Werkstofftechnik, 2015, 46(7): 661-667.

[11] [11] Temmler A, Willenborg E, Wissenbach K. Design surfaces by laser rem-elting[J]. Physics Procedia, 2011, 12(3): 419-430.

[12] [12] Schuelke T, Grotjohn TA. Diamond polishing[J]. Diamond and Related Materials, 2013, 32: 17-26.

[13] [13] Hird, JR, Field, JE. A wear mechanism map for the diamond polishing process[J]. Wear, 2005, 258: 18-25.

[14] [14] Doronin MA, Polyakov SN, Kravchuk KS, et al. Limits of single crystal diamond surface mechanical polishing[J]. Diamond and Related Materials, 2018, 87: 149-155.

[15] [15] Cheng Y W, Zhang F, Kuang T C, et al. Chemical/mechanical polishing of dia - mond films assisted by molten mixture of LiNO3 and KNO3[J]. Thin Solid Films, 2006, 496(2): 698-702.

[16] [16] Cheng C Y, Tsai H Y, Wu C H, et al. An oxidation enhanced mechanical polis-hing technique for CVD diamond films[J]. Diamond and Related Materials, 2005, 14(3): 622-625.

[17] [17] Chou W C, Chao C L, Chien H H, et al. Investigation of thermo-chemical poli-shing of CVD diamond film[J]. Key Engineering Materials, 2007, 329(8): 195-200.

[18] [18] Thomas ELH, Mandal S, Brousseau, EB, Williams OA. Silica based polishing of {100} and {111} single crystal diamond[J]. Science and Technology of Advanced Materials, 2014, 15(3): 035013.

[19] [19] Akihisa Kubota, Shin Nagae, Shuya Motoyama, et al. Twostep polishing technique for single crystal diamond (100) substrate utilizing a chemical reaction with iron plate.[J]. Diamond and Related Materials, 2015, 60: 75-80.

[20] [20] Koslowski B, Strobel S, Ziemann P. Ion polishing of a diamond (100) surface artificially roughened on the nanoscale[J]. Diamond and Related Materials, 2000, 9: 1159-1163.

[21] [21] Yatsui Takash, Yamaguchi Maiku, Nobusada Katsuyuki. Nano-scale chemical reactions based on non-uniform optical near - fields and their applications.[J]. Progress in Quantum Electronics, 2017, 55(1): 166-194.

[22] [22] Yatsui T, Nomura W, Naruse M, et al. Realization of an atomically flat surface of diamond using dressed photon-phonon etching (Article)[J]. Journal of Physics D: Applied Physics, 2012, 45(47): 1.

[23] [23] Guo Z N, Wang C Y, Kuang T C. Investigation into polishing process of CVD diamond films[J]. Materials and Manufacturing Processes, 2002, 17(1): 45-55.

[24] [24] Kong L R. A study on laser micro-machining of ceramics material[D]. Wuhan: Huazhong University of Science and Technology, 2014.

[25] [25] Song Y Q. Study on process of polishing sapphire with ultraviolet laser[D]. Guangzhou: Guangdong University of Technology, 2011.

[26] [26] Zheng Q Z, Cui J L, Fan Z J, et al. Investigation on the underwater femtosecond laser polishing SiC ceramic[J]. Ferroelectrics, 2020, 564(1): 28-36.

[27] [27] Zhang Y. Research on polishing technology of CVD diamond coating based on femtosecond laser[D]. Hefei: Anhui Jianzhu University, 2019.

[28] [28] Prieske M, Vollertsen F. Picosecond - laser polishing of CVD-diamond coatings without graphite formation[J]. Materials Today: Proceedings, 2021, 40: 1-4.