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Laser Journal, Volume. 46, Issue 1, 214(2025)

Research on CVD diamond polishing based on nanosecond laser composite ion beam etching technology

FENG Yusen1, ZHAO Zhiyan1, YU Yanhao1, XU Yin1, XU Dihua2, and LI Aiwu1、*
Author Affiliations
  • 1State Key Laboratory of Integrated Optoelectronics, College of Electronic Science&Engineering, Jilin University, Changchun 130012, China
  • 2Guang Dong Zheng Ye Technology Co., Ltd. Dongguan Guangdong 523000, China
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    FENG Yusen, ZHAO Zhiyan, YU Yanhao, XU Yin, XU Dihua, LI Aiwu. Research on CVD diamond polishing based on nanosecond laser composite ion beam etching technology[J]. Laser Journal, 2025, 46(1): 214

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    Paper Information

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    Received: Aug. 9, 2024

    Accepted: Apr. 17, 2025

    Published Online: Apr. 17, 2025

    The Author Email: LI Aiwu (liaw@jlul.edu.cn)

    DOI:10.14016/j.cnki.jgzz.2025.01.214

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology