Fig. 1. Piezoelectric rotary actuator structure

Fig. 2. Driving signal and principle

Fig. 3. Quadrilateral driving unit and rotor model

Fig. 4. Quadrilateral drive unit

Fig. 5. Analysis of S-type flexure hinge

Fig. 6. Static analysis of inertia compensation unit

Fig. 7. Stress analysis

Fig. 8. Inertia compensation unit finite element analysis

Fig. 9. Experimental system

Fig. 10. Amplitude-frequency characteristic curve

Fig. 11. Rotation angles at different frequencies

Fig. 12. Frequency comparison analysis

Fig. 13. Voltage performance test

Fig. 14. Voltage comparison analysis

Fig. 15. Motion stability test

Fig. 16. Resolution test

Fig. 17. Load characteristic test