Researching | Assembly Error Tolerance of Interferometer Plate in Mirau Interference-Microscope Objective

Chinese Journal of Lasers, Volume. 46, Issue 9, 904001(2019)

Assembly Error Tolerance of Interferometer Plate in Mirau Interference-Microscope Objective

Hu Jie, Yuan Qun, Yu Haobiao, Wang Shuai, Sun Yifeng, and Gao Zhishan^*

Author Affiliations

School of Electronic and Optical Engineering, Nanjing University of Science and Technology,Nanjing, Jiangsu 210094, China

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References(11)

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[2] Luo S J, Sasaki O, Chen Z Y et al. Utilization of complex-valued signals in a white-light scanning interferometer for accurate measurement of a surface profile[J]. Applied Optics, 56, 4419-4425(2017). http://www.ncbi.nlm.nih.gov/pubmed/29047872

[3] Deng Q Y, Tang Y, Zhou Y et al. High-resolution surface topography measurement based on frequency-domain analysis in white light interferometry[J]. Chinese Journal of Lasers, 45, 0604001(2018).

[4] Li C S, Shen W D, Zhang Y G et al. Measurement of group delay dispersion of dispersive mirror based on white-light interference[J]. Acta Optica Sinica, 32, 1031003(2012).

[5] Farr K B. Beamsplitter cube for white light interferometry[J]. Optical Engineering, 31, 2191-2196(1992). http://spie.org/Publications/Journal/10.1117/12.59886

[6] Pförtner A, Schwider J. Dispersion error in white-light Linnik interferometers and its implications for evaluation procedures[J]. Applied Optics, 40, 6223-6228(2001). http://www.opticsinfobase.org/abstract.cfm?URI=AO-40-34-6223

[7] Pavlicek P, Soubusta J. Measurement of the influence of dispersion on white-light interferometry[J]. Applied Optics, 43, 766-770(2004). http://www.ncbi.nlm.nih.gov/pubmed/14960067

[8] Pikálek T, Fort T, Buchta Z. Detection techniques in low-coherence interferometry and their impact on overall measurement accuracy[J]. Applied Optics, 53, 8463-8470(2014). http://www.ncbi.nlm.nih.gov/pubmed/25608195

[9] de Groot P, de Lega X C. Signal modeling for low-coherence height-scanning interference microscopy[J]. Applied Optics, 43, 4821-4830(2004). http://www.ncbi.nlm.nih.gov/pubmed/15449468

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[11] Han Z G, Chen L. Eight-step phase shifting algorithm for broadband light interferometry insensitive to envelop variation and phase shifting error[J]. Infrared and Laser Engineering, 44, 1236-1242(2015).

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Hu Jie, Yuan Qun, Yu Haobiao, Wang Shuai, Sun Yifeng, Gao Zhishan. Assembly Error Tolerance of Interferometer Plate in Mirau Interference-Microscope Objective[J]. Chinese Journal of Lasers, 2019, 46(9): 904001

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Paper Information

Category: Measurement and metrology

Received: Mar. 7, 2019

Accepted: --

Published Online: Sep. 10, 2019

The Author Email: Zhishan Gao (zhishgao@njust.edu.cn)

DOI:10.3788/CJL201946.0904001

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology