Fig. 1. Interferometric imaging optical path of white light interferometer and Mirau interference-microscope objective

Fig. 2. Equivalent optical path of interference-microscope objective with titled reference plate. (a) Sectional optical path of interference- microscope objective; (b) top view of pupil plane in interference-microscope objective; (c) division of S region in pupil plane

Fig. 3. Relationship between tilt of reference plate θ and rotation angle α

Fig. 4. Interferometric optical path with tilted reference plate

Fig. 5. Spectral distribution of LED light source

Fig. 6. Interference fringes under different tilts. (a) θ0=0°; (b) θ0=0.5°; (c) θ0=1°; (d) θ0=1.5°; (e) θ0=2°

Fig. 7. Comparison of morphology reconstruction results. (a) Primary morphology; (b) reconstruction errors under different tilts

Fig. 8. Measured results of step. (a) Information of standard step; (b) measured results of standard step by Veeco NT9100 profilometer

Fig. 9. Interference fringes and envelope amplitudes corresponding to different tilts of reference plate. (a) θ0=0°; (b) θ0=0.5°; (c) θ0=1°; (d) θ0=1.5°; (e) θ0=2°