Application of Phase-Shifting and Focal-Switching Method in Modulation Measurement Profilometry

Yongyi Lu; Min Zhong; Xu Zhao; Jiahui Wang; Xueqin Zhang; Min Li; Yaowei Gan; Xianglin Dai; Kaizhi Huang

doi:10.3788/AOS202242.1512004

Acta Optica Sinica, Volume. 42, Issue 15, 1512004(2022)

Application of Phase-Shifting and Focal-Switching Method in Modulation Measurement Profilometry

Yongyi Lu, Min Zhong^*, Xu Zhao, Jiahui Wang, Xueqin Zhang, Min Li, Yaowei Gan, Xianglin Dai, and Kaizhi Huang

Author Affiliations

College of Optoelectronic Engineering, Chengdu University of Information Technology, Chengdu 610225, Sichuan , China

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Yongyi Lu, Min Zhong, Xu Zhao, Jiahui Wang, Xueqin Zhang, Min Li, Yaowei Gan, Xianglin Dai, Kaizhi Huang. Application of Phase-Shifting and Focal-Switching Method in Modulation Measurement Profilometry[J]. Acta Optica Sinica, 2022, 42(15): 1512004

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Jan. 27, 2022

Accepted: Mar. 2, 2022

Published Online: Aug. 4, 2022

The Author Email: Min Zhong (zm1013@cuit.edu.cn)

DOI:10.3788/AOS202242.1512004

Topics

laser devices and laser physics

Lasers and Laser Optics

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laser manufacturing

Instrumentation, Measurement and Metrology