High-speed PGC demodulation model and method with subnanometer displacement resolution in a fiber-optic micro-probe laser interferometer

Yisi Dong; Wenwen Li; Jinran Zhang; Wenrui Luo; Haijin Fu; Xu Xing; Pengcheng Hu; Yongkang Dong; Jiubin Tan

doi:10.1364/PRJ.513576

Photonics Research, Volume. 12, Issue 5, 921(2024)

High-speed PGC demodulation model and method with subnanometer displacement resolution in a fiber-optic micro-probe laser interferometer

Yisi Dong^1,2, Wenwen Li^1,2, Jinran Zhang^1,2, Wenrui Luo^1,2, Haijin Fu^1,2,4、*, Xu Xing^1,2,5、*, Pengcheng Hu^1,2, Yongkang Dong³, and Jiubin Tan^1,2

Author Affiliations

¹Center of Ultra-precision Optoelectronic Instrument, Harbin Institute of Technology, Harbin 150080, China

²Key Laboratory of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China

³National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin 150001, China

⁴e-mail: haijinfu@hit.edu.cn

⁵e-mail: Xingxu@hit.edu.cn

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Yisi Dong, Wenwen Li, Jinran Zhang, Wenrui Luo, Haijin Fu, Xu Xing, Pengcheng Hu, Yongkang Dong, Jiubin Tan, "High-speed PGC demodulation model and method with subnanometer displacement resolution in a fiber-optic micro-probe laser interferometer," Photonics Res. 12, 921 (2024)

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Paper Information

Category: Instrumentation and Measurements

Received: Nov. 20, 2023

Accepted: Feb. 15, 2024

Published Online: May. 6, 2024

The Author Email: Haijin Fu (haijinfu@hit.edu.cn), Xu Xing (Xingxu@hit.edu.cn)

DOI:10.1364/PRJ.513576

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology