High-speed PGC demodulation model and method with subnanometer displacement resolution in a fiber-optic micro-probe laser interferometer

Yisi Dong; Wenwen Li; Jinran Zhang; Wenrui Luo; Haijin Fu; Xu Xing; Pengcheng Hu; Yongkang Dong; Jiubin Tan

doi:10.1364/PRJ.513576

Photonics Research, Volume. 12, Issue 5, 921(2024)

High-speed PGC demodulation model and method with subnanometer displacement resolution in a fiber-optic micro-probe laser interferometer

Yisi Dong1...2, Wenwen Li1,2, Jinran Zhang1,2, Wenrui Luo1,2, Haijin Fu1,2,4,*, Xu Xing1,2,5,*, Pengcheng Hu1,2, Yongkang Dong3, and Jiubin Tan12 |Show fewer author(s)

Author Affiliations

¹Center of Ultra-precision Optoelectronic Instrument, Harbin Institute of Technology, Harbin 150080, China

²Key Laboratory of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China

³National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin 150001, China

⁴e-mail: haijinfu@hit.edu.cn

⁵e-mail: Xingxu@hit.edu.cn

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Yisi Dong, Wenwen Li, Jinran Zhang, Wenrui Luo, Haijin Fu, Xu Xing, Pengcheng Hu, Yongkang Dong, Jiubin Tan, "High-speed PGC demodulation model and method with subnanometer displacement resolution in a fiber-optic micro-probe laser interferometer," Photonics Res. 12, 921 (2024)

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