Photonics Research, Volume. 12, Issue 5, 921(2024)

High-speed PGC demodulation model and method with subnanometer displacement resolution in a fiber-optic micro-probe laser interferometer

Yisi Dong1...2, Wenwen Li1,2, Jinran Zhang1,2, Wenrui Luo1,2, Haijin Fu1,2,4,*, Xu Xing1,2,5,*, Pengcheng Hu1,2, Yongkang Dong3, and Jiubin Tan12 |Show fewer author(s)
Author Affiliations
  • 1Center of Ultra-precision Optoelectronic Instrument, Harbin Institute of Technology, Harbin 150080, China
  • 2Key Laboratory of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China
  • 3National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin 150001, China
  • 4e-mail: haijinfu@hit.edu.cn
  • 5e-mail: Xingxu@hit.edu.cn
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    Yisi Dong, Wenwen Li, Jinran Zhang, Wenrui Luo, Haijin Fu, Xu Xing, Pengcheng Hu, Yongkang Dong, Jiubin Tan, "High-speed PGC demodulation model and method with subnanometer displacement resolution in a fiber-optic micro-probe laser interferometer," Photonics Res. 12, 921 (2024)

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    Paper Information

    Category: Instrumentation and Measurements

    Received: Nov. 20, 2023

    Accepted: Feb. 15, 2024

    Published Online: May. 6, 2024

    The Author Email: Haijin Fu (haijinfu@hit.edu.cn), Xu Xing (Xingxu@hit.edu.cn)

    DOI:10.1364/PRJ.513576

    CSTR:32188.14.PRJ.513576

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