Researching | High-power, narrow linewidth solid-state deep ultraviolet laser generation at 193 nm by frequency mixing in LBO crystals

Advanced Photonics Nexus, Volume. 3, Issue 2, 026012(2024)

High-power, narrow linewidth solid-state deep ultraviolet laser generation at 193 nm by frequency mixing in LBO crystals

Zhitao Zhang1... Hanghang Yu1, Sheng Chen1, Zheng Li1, Xiaobo Heng1, and Hongwen Xuan12,* |Show fewer author(s)

Author Affiliations

¹Chinese Academy of Sciences, GBA branch of Aerospace Information Research Institute, Guangzhou, China

²University of Chinese Academy of Sciences, Beijing, China

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References(33)

[1] M. Totzeck et al. Pushing deep ultraviolet lithography to its limits. Nat. Photonics, 1, 629-631(2007).

[2] B. M. Barnes et al. Three-dimensional deep sub-wavelength defect detection using λ=193 nm optical microscopy. Opt. Express, 21, 26219-26226(2013). https://doi.org/10.1364/OE.21.026219

[3] A. D. Shutov et al. Highly efficient tunable picosecond deep ultraviolet laser system for Raman spectroscopy. Opt. Lett., 44, 5760-5763(2013).

[4] S. Tanaka et al. Development of high coherence high power 193 nm laser. Proc. SPIE, 9726, 972624(2016).

[5] B. Päivänranta et al. Sub-10 nm patterning using EUV interference lithography. Nanotechnology, 22, 375302(2011).

[6] M. Kobayashi et al. DUV high power lasers processing for glass and CFRP. Proc. SPIE, 10238, 102381D(2017).

[7] H. Xuan et al. Development of narrow-linewidth Yb- and Er-fiber lasers and frequency mixing for ArF excimer laser seeding. Proc. SPIE, 8961, 89612M(2014).

[8] J. Zhang et al. Distributed Kerr lens mode-locked Yb:YAG thin-disk oscillator. Ultrafast Sci., 2022, 9837892(2022).

[9] H. Xuan et al. High-power and high-conversion efficiency deep ultraviolet (DUV) laser at 258 nm generation in the CsLiB6O10 (CLBO) crystal with a beam quality of M2<1.5. Opt. Lett., 42, 3133-3136(2017). https://doi.org/10.1364/OL.42.003133

[10] J. Sakuma et al. Continuous-wave 193.4 nm laser with 120 mW output power. Opt. Lett., 40, 5590-5593(2015).

[11] M. Müller et al. High-average-power femtosecond laser at 258 nm. Opt. Lett., 42, 2826-2829(2017).

[12] A. M. Rodin et al. Comparison of Yb:YAG single crystal fiber with larger aperture CPA pumped at 940 nm and 969 nm, s1905(2017).

[13] M. Scholz et al. A bright continuous-wave laser source at 193 nm. Appl. Phys. Lett., 103, 051114(2013).

[14] H. Kawai et al. UV light source using fiber amplifier and nonlinear wavelength conversion, CTuT4(2003).

[15] M. Tsuboi et al. Development of high-power, 6 kHz, single-mode Ti: sapphire laser at 904 nm for generating 193 nm light. Jpn. J. Appl. Phys., 54, 042702(2015).

[16] H. Xuan et al. 300-mW narrow-linewidth deep-ultraviolet light generation at 193 nm by frequency mixing between Yb-hybrid and Er-fiber lasers. Opt. Express, 23, 10564-10572(2015).

[17] H. Xuan et al. 1 W solid-state 193 nm coherent light by sum-frequency generation. Opt. Express, 25, 29172-29179(2017).

[18] Z. Zhao et al. Watt-level 193 nm source generation based on compact collinear cascaded sum frequency mixing configuration. Opt. Express, 26, 19435-19444(2018).

[19] D. G. Nikitin et al. Sum frequency generation of UV laser radiation at 266 nm in LBO crystal. Opt. Lett., 41, 1660-1663(2016).

[20] Q. Fu et al. High-power, high-efficiency, all-fiberized-laser-pumped, 260-nm, deep-UV laser for bacterial deactivation. Opt. Express, 29, 42485-42494(2021).

[21] A. J. Merriam et al. Efficient nonlinear frequency conversion to 193-nm using cooled BBO, MB11(2007).

[22] K. Kohno et al. High-power DUV picosecond pulse laser with a gain-switched-LD-seeded MOPA and large CLBO crystal. Opt. Lett., 45, 2351-2354(2020).

[23] T. Kawamura et al. Effect of water impurity in CsLiB6O10 crystals on bulk laser-induced damage threshold and transmittance in the ultraviolet region. Appl. Opt., 48, 1658-1662(2009). https://doi.org/10.1364/AO.48.001658

[24] X. Yuan et al. Growth and characterization of large CLBO crystals. J. Cryst. Growth, 293, 97-101(2006).

[25] R. D. Mead, C. E. Hamilton, D. D. Lowenthal. Solid state lasers for 193-nm photolithography. Proc. SPIE, 3051, 882-889(1997).

[26] C. E. Hamilton et al. All solid-state, single-frequency 193-nm laser system for deep-UV metrology, 322-323(1998).

[27] T. Ohtsuki et al. 193-nm generation by eighth harmonics of Er3+-doped fiber amplifier, PD9(2000). https://doi.org/10.1109/CLEO.2000.906788

[28] A. Borsutzky, R. Brünger, R. Wallenstein. Tunable UV radiation at short wavelengths (188–240 nm) generated by sum-frequency mixing in lithium borate. Appl. Phys. B, 52, 380-384(1991).

[29] Z. Zhang et al. 10 kW peak power, single-frequency 1553 nm nanosecond pulsed fiber laser for time-of-flight LIDAR. Appl. Phys. Express, 16, 022002(2013).

[30] Y. Zaouter et al. Direct amplification of ultrashort pulses in μ-pulling-down Yb: YAG single crystal fibers. Opt. Lett., 36, 748-750(2011). https://doi.org/10.1364/OL.36.000748

[31] Y. Orii et al. Stable 10,000-hour operation of 20-W deep ultraviolet laser generation at 266 nm. Opt. Express, 30, 11797-11808(2022).

[32] K. Takachiho et al. Ultraviolet laser-induced degradation of CsLiB6O10 and β-BaB2O4. Opt. Mater. Express, 4, 559-567(2014). https://doi.org/10.1364/OME.4.000559

[33] Z. Hu. Development of large-size LBO crystal growth, 18a_D5_4(2013).

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Zhitao Zhang, Hanghang Yu, Sheng Chen, Zheng Li, Xiaobo Heng, Hongwen Xuan, "High-power, narrow linewidth solid-state deep ultraviolet laser generation at 193 nm by frequency mixing in LBO crystals," Adv. Photon. Nexus 3, 026012 (2024)

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Paper Information

Category: Research Articles

Received: Dec. 29, 2023

Accepted: Mar. 6, 2024

Published Online: Mar. 29, 2024

The Author Email: Hongwen Xuan (xuanhw@aircas.ac.cn)

DOI:10.1117/1.APN.3.2.026012

CSTR:32397.14.1.APN.3.2.026012

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology