Fig. 1. Experimental setup of the 193-nm laser system. SHG, second-harmonic generation; FHG, fourth-harmonic generation; SFG, sum frequency generation; DM1, AR@515 nm/HR@258 nm dichroic mirror; DM2: HR@258 nm/AR@1553 nm dichroic mirror.

Fig. 2. Experimental setup of the 1030 nm Yb-hybrid pulsed laser. AOM, acoustic-optics modulator; ISO, isolator; PCF, photonic crystal fiber; PBS, polarization beam splitter; QW, quarter-wave plate.

Fig. 3. (a) Output power versus pump power in the Yb:YAG bulk crystal amplifier with single-pass and double-pass configurations; (b) the beam profiles of the 1030-nm laser output at 14.6 W of Yb:YAG bulk crystal.

Fig. 4. Output average powers of (a) 515-nm laser and (b) 258-nm laser as the function of pump average powers of 1030 and 515 nm lasers, respectively.

Fig. 5. Output average powers of (a) 221-nm laser and (b) 193-nm laser generated from the first and second SFG in LBO crystal as a function of pump average powers of 258 and 221 nm lasers, respectively.

Fig. 6. (a) Pulse duration of the generated 193 nm laser. Inset: Beam profile of the 193-nm laser. Measured beam profiles of (b) the 258-nm laser and (c) the 221-nm laser.

Fig. 7. Power stability of the free-running 193-nm laser within 1500 s.