Laser & Optoelectronics Progress, Volume. 59, Issue 9, 0922013(2022)

Ultra-Precision Motion Stage Control Technology for IC Lithography

Yang Liu... Li Li*, Siwen Chen and Jiubin Tan |Show fewer author(s)
Author Affiliations
  • Key Laboratory of Ultra-Precision Intelligent Instrumentation, Ministry of Industry and Information Technology, Harbin Institute of Technology, Harbin 150001, Heilongjiang , China
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    Yang Liu, Li Li, Siwen Chen, Jiubin Tan. Ultra-Precision Motion Stage Control Technology for IC Lithography[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922013

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Apr. 1, 2022

    Accepted: Apr. 19, 2022

    Published Online: May. 10, 2022

    The Author Email: Li Li (hitlili@hit.edu.cn)

    DOI:10.3788/LOP202259.0922013

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