Chinese Optics Letters, Volume. 7, Issue 5, 05407(2009)

Non-piece-wise error compensation for grating displacement measurement system with absolute zero mark

Xiaojun Jiang... Huijie Huang, Xiangzhao Wang and Lihua Huang |Show fewer author(s)
Author Affiliations
  • Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China2 Graduate University of the Chinese Academy of Sciences, Beijing 100049, ChinaE-mail: xiaojunj@siom.ac.cn
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    CLP Journals

    [1] Chunhua Wei, Shuhua Yan, Cunbao Lin, Zhiguang Du, Guochao Wang, "Compact grating displacement measurement system with a 3 × 3 coupler," Chin. Opt. Lett. 13, 051301 (2015)

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    Xiaojun Jiang, Huijie Huang, Xiangzhao Wang, Lihua Huang, "Non-piece-wise error compensation for grating displacement measurement system with absolute zero mark," Chin. Opt. Lett. 7, 05407 (2009)

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    Paper Information

    Received: Aug. 18, 2008

    Accepted: --

    Published Online: May. 22, 2009

    The Author Email:

    DOI:10.3788/COL20090705.0407

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