Non-piece-wise error compensation for grating displacement measurement system with absolute zero mark

Xiaojun Jiang; Huijie Huang; Xiangzhao Wang; Lihua Huang

doi:10.3788/COL20090705.0407

Chinese Optics Letters, Volume. 7, Issue 5, 05407(2009)

Non-piece-wise error compensation for grating displacement measurement system with absolute zero mark

Xiaojun Jiang, Huijie Huang, Xiangzhao Wang, and Lihua Huang

Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China2 Graduate University of the Chinese Academy of Sciences, Beijing 100049, ChinaE-mail: xiaojunj@siom.ac.cn

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Xiaojun Jiang, Huijie Huang, Xiangzhao Wang, Lihua Huang, "Non-piece-wise error compensation for grating displacement measurement system with absolute zero mark," Chin. Opt. Lett. 7, 05407 (2009)

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Paper Information

Received: Aug. 18, 2008

Accepted: --

Published Online: May. 22, 2009

The Author Email:

DOI:10.3788/COL20090705.0407

Topics

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