Laser & Optoelectronics Progress, Volume. 61, Issue 2, 0211005(2024)
Research Progress on Key Technologies of Chromatic Confocal Sensors (Invited)
Fig. 8. Dispersion of ROE and DOE. (a) Refracting Optical Element; (b) diffractive Optical Element
Fig. 9. Miniaturized chromatic confocal point sensor with a diameter smaller than 2 mm[33]
Fig. 10. Chromatic confocal measurement system based on FZP[38]. (a) FZP; (b) measurement system
Fig. 11. Dispersion of hybrid lens and pure diffractive lens[12]. (a) Hybrid aspheric diffractive; (b) pure lens diffractive
Fig. 12. Chromatic confocal measurement system based on supercontinuum light source[47]
Fig. 14. The confocal spectrum measured by the spectrometer[20]. (a) Spectral distribution of measurement signal with uniform power white light; (b) spectral distribution of measurement signal with white LED
Fig. 18. Three typical optical path structures of optical fiber spectrometer. (a) Crossed-asymmetric Czerny-Turner spectrometer; (b) symmetric Czerny-Turner spectrometer; (c) L-G-L spectrometer
Fig. 31. The type of spatial filter. (a) Slit; (b) pinhole array; (c) optical fiber array[97]
Fig. 33. Structure of line scanning chromatic confocal based on cylindrical mirror[99]
Fig. 37. Chromatic confocal three-point sensor[104]. (a) Structure diagram; (b) layout of segmented diffraction elements
Fig. 40. DMD-based lateral scanning system[118]. (a) Schematic diagram of the system; (b) scanning floor plan
Fig. 42. Chromatic confocal system based on DMD[120]. (a) System diagram; (b) DMD projection pattern
Fig. 43. Different types of objective light path[71]. (a) Non-flat field non-telecentric objective; (b) flat-field non-telecentric objective; (c) flat-field telecentric objective
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Rongsheng Lu, Zilong Zhang, Ailin Zhang, Zhiwei Feng, Yan Xu, Liujie Yang. Research Progress on Key Technologies of Chromatic Confocal Sensors (Invited)[J]. Laser & Optoelectronics Progress, 2024, 61(2): 0211005
Category: Imaging Systems
Received: Dec. 7, 2023
Accepted: Dec. 21, 2023
Published Online: Feb. 6, 2024
The Author Email: Rongsheng Lu (rslu@hfut.edu.cn)
CSTR:32186.14.LOP232639