Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Laser & Optoelectronics Progress, Volume. 53, Issue 12, 123101(2016)

Characteristics of Compactness of SiO2 Thin Films Prepared by PECVD Method

Xiao Heping*, Sun Rujian, Ma Xiangzhu, Yang Kai, and Zhang Shuangxiang
Author Affiliations
  • [in Chinese]
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (0)
    Equations (0)
    References (14)
    Cited By (3)
    Tools
    Paper Information
    Topics
    Cited By

    Article index updated: Sep. 15, 2025

    The article is cited by 3 article(s) CLP online library. (Some content might be in Chinese.)
    Tools

    Get Citation

    Copy Citation Text

    Xiao Heping, Sun Rujian, Ma Xiangzhu, Yang Kai, Zhang Shuangxiang. Characteristics of Compactness of SiO2 Thin Films Prepared by PECVD Method[J]. Laser & Optoelectronics Progress, 2016, 53(12): 123101

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: Thin Films

    Received: Jun. 27, 2016

    Accepted: --

    Published Online: Dec. 14, 2016

    The Author Email: Xiao Heping (ietgu@163.com)

    DOI:10.3788/lop53.123101

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology