Optics and Precision Engineering, Volume. 30, Issue 15, 1845(2022)

Efficient adaptive flying cutting for infrared optics micro-structured surfaces

Peizheng LI1, Xue DU2, Zhanwen SUN1、*, Sujuan WANG1, and Shijun XU1
Author Affiliations
  • 1State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou50006, China
  • 2State Key Laboratory in Ultra-precision Machining Technology, Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hong Kong999077, China
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    Figures & Tables(15)
    Schematic diagram of ultra-precision flying cutting process
    Schematic diagram of chip formation of self-tuned ultra-precision flying cutting and conventional ultra-precision flying cutting
    Chip image
    Mathematical model of chip generation
    Cutting path center of rotation position
    Schematic diagram of cutting speed comparison
    Experimental setup
    Comparison of maximum chip thickness of plastic working model
    Segmented optical microscopic images for self-tuned flying cutting micro-groove
    Surface roughness of micro-groove prepared by self-tuned flying cutting under white light interferometer
    Segmented optical microscopic image of micro-groove prepared by conventional flying cutting at 3 mm/min feed rate
    Surface roughness of micro-groove prepared by conventional flying cutting at 3 mm/min feed rate under white light interferometer
    Segmented optical microscopic image for conventional flying cutting micro-groove at 8 mm/min feed rate
    Surface roughness of micro-groove prepared by conventional flying cutting at 8 mm/min feed rate under white light interferometer
    • Table 1. Parameters of self-tuned flying cutting and conventional flying cutting

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      Table 1. Parameters of self-tuned flying cutting and conventional flying cutting

      加工参数自适应调速飞刀切削传统飞刀切削
      材料单晶硅单晶硅
      晶向<110><110>
      主轴转速/(r·min-11 0001 000
      回转半径/mm1212
      切削深度/μm2020
      进给速度/(mm·min-183、8
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    Peizheng LI, Xue DU, Zhanwen SUN, Sujuan WANG, Shijun XU. Efficient adaptive flying cutting for infrared optics micro-structured surfaces[J]. Optics and Precision Engineering, 2022, 30(15): 1845

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    Paper Information

    Category: Design,Fabrication and Application of Planar Optical Elements

    Received: May. 17, 2022

    Accepted: --

    Published Online: Sep. 7, 2022

    The Author Email: Zhanwen SUN (zw.sun@gdut.edu.cn)

    DOI:10.37188/OPE.20223015.1845

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