Chinese Journal of Lasers, Volume. 47, Issue 6, 601004(2020)
Effect of EUV Source Parameters on Focused Beam Performance of EUV Radiation-Damage-Test System
Figures & Tables(11)
Fig. 8. Variation of single pulse energy density and power density of focused beam with conditions of EUV source
Table 1. Typical working conditions and spot sizes
View tableTable 1. Typical working conditions and spot sizes
No. Frequency / Hz Electric pulse energy /J Power /W Spot size (FWHM) / mm A 200 3.0 600 0.79 B 1000 3.6 3600 0.86 C 500 3.6 1800 0.81 D 200 8.0 1600 1.44 E 200 5.0 1000 1.06 F 1500 4.6 6900 1.04 G 1000 4.6 4600 1.01
Table 2. Ar pressure under different working conditions and indications of regulating valve
View tableTable 2. Ar pressure under different working conditions and indications of regulating valve
Indication of regulating valve Ar pressure /Pa A C D E F 25 0.46 0.47 0.42 0.45 0.47 30 0.65 0.69 0.62 0.65 0.74 35 1.20 1.33 1.21 1.22 1.57 40 2.29 2.48 2.26 2.23 3.14 45 4.39 4.83 4.33 4.24 6.42
Table 3. Single pulse energy density and power density at focus under typical working conditions
View tableTable 3. Single pulse energy density and power density at focus under typical working conditions
No. Frequency / Hz Electric pulse energy /J Single pulse energy density / (mJ·cm-2) Power density / (W·cm-2) A 200 3.0 22.87 4.57 B 1000 3.6 23.73 23.73 C 500 3.6 25.61 12.81 D 200 8.0 26.78 5.36 E 200 5.0 31.53 6.31 F 1500 4.6 21.92 32.87 G 1000 4.6 23.92 23.92
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Xie Wanlu, Wu Xiaobin, Wang Kuibo, Luo Yan, Wang Yu. Effect of EUV Source Parameters on Focused Beam Performance of EUV Radiation-Damage-Test System[J]. Chinese Journal of Lasers, 2020, 47(6): 601004
Paper Information
Category: laser devices and laser physics
Received: Dec. 18, 2019
Accepted: --
Published Online: Jun. 3, 2020
The Author Email: Xiaobin Wu (wuxiaobin@ime.ac.cn)
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