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Chinese Journal of Lasers, Volume. 47, Issue 6, 601004(2020)

Effect of EUV Source Parameters on Focused Beam Performance of EUV Radiation-Damage-Test System

Xie Wanlu, Wu Xiaobin*, Wang Kuibo, Luo Yan, and Wang Yu
Author Affiliations
  • Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
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    Article index updated: Mar. 10, 2025

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    Xie Wanlu, Wu Xiaobin, Wang Kuibo, Luo Yan, Wang Yu. Effect of EUV Source Parameters on Focused Beam Performance of EUV Radiation-Damage-Test System[J]. Chinese Journal of Lasers, 2020, 47(6): 601004

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    Paper Information

    Category: laser devices and laser physics

    Received: Dec. 18, 2019

    Accepted: --

    Published Online: Jun. 3, 2020

    The Author Email: Xiaobin Wu (wuxiaobin@ime.ac.cn)

    DOI:10.3788/CJL202047.0601004

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology