Chinese Journal of Lasers, Volume. 37, Issue S1, 256(2010)
Micro-Electro-Mechanical System Dynamic Tests by Laser Self-Mixing Effect
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Zhang Zhaoyun, Gao Yang, Zhao Xinghai, Zhao Xiang. Micro-Electro-Mechanical System Dynamic Tests by Laser Self-Mixing Effect[J]. Chinese Journal of Lasers, 2010, 37(S1): 256
Category: Measurement and metrology
Received: Apr. 16, 2010
Accepted: --
Published Online: Oct. 29, 2010
The Author Email: Zhaoyun Zhang (zzy_caep@163.com)