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Chinese Journal of Lasers, Volume. 37, Issue S1, 256(2010)

Micro-Electro-Mechanical System Dynamic Tests by Laser Self-Mixing Effect

Zhang Zhaoyun1,2、*, Gao Yang1,3, Zhao Xinghai1, and Zhao Xiang1
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  • 1[in Chinese]
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    Zhang Zhaoyun, Gao Yang, Zhao Xinghai, Zhao Xiang. Micro-Electro-Mechanical System Dynamic Tests by Laser Self-Mixing Effect[J]. Chinese Journal of Lasers, 2010, 37(S1): 256

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    Paper Information

    Category: Measurement and metrology

    Received: Apr. 16, 2010

    Accepted: --

    Published Online: Oct. 29, 2010

    The Author Email: Zhaoyun Zhang (zzy_caep@163.com)

    DOI:10.3788/cjl201037s1.0256

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology