Acta Optica Sinica, Volume. 29, Issue s1, 216(2009)

Real-Time Surface Profile Measurement in a Laser Diode Interferometer Insensitive to Disturbance

He Guotian1,2,3、*, Zeng Zhi1, and Li Ming1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    References(13)

    [2] [2] R. Shinozaki, O. Sasaki, T. Suzuki. Fast scanning method for one-dimensional surface profile measurement by detecting angular of a laser beam[J]. Appl. Opt., 2004, 43(21): 4157~4163

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    [5] [5] Masayuki Yokota, Atsuyoshi Asaka, Toshihiko Yoshino. Stabilization improvements of laser-diode closed-loop heterodyne phase-shifting interferometer for surface profile measurement[J]. Appl. Opt., 2003, 42(10): 1805~1805

    [7] [7] Jinhuan Li, Osami Sasaki, Takamasa Suzuki. Measurement of diameter of metal cylinders using a sinusoidally vibrating interference pattern[J].Opt. Commun.,2006,260: 1361~1365

    [8] [8] O. Sasaki, T. Okamura, T. Nakamura. Sinusoidal phase modulating Fizeau interferometer[J].Appl. Opt., 1990, 29(4): 512~515

    [10] [10] O. Sasaki, T. Nakada, T. Suzuki.Exact measurements of surface profiles of a glass plate by a superluminescent diode interferometer[J].Appl. Opt., 1999, 38(10): 1679~1682

    [11] [11] T. Suzuki, O. Sasaki,T.Maruyama. Phase locked laser diode interferometry for surface profile measurement[J]. Appl.Opt.,1989,28(20):1872~1879

    [12] [12] T. Suzuki, O. Sasaki,T.Maruyama. Real-time displacement measurement using synchronous detection in a sinusoidal phase modulating interterometer[J].Appl.Opt.,1993,32(5):1635~1639

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    He Guotian, Zeng Zhi, Li Ming. Real-Time Surface Profile Measurement in a Laser Diode Interferometer Insensitive to Disturbance[J]. Acta Optica Sinica, 2009, 29(s1): 216

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    Paper Information

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    Received: --

    Accepted: --

    Published Online: Jun. 25, 2009

    The Author Email: He Guotian (slhgt@siom.ac.cn)

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