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Acta Optica Sinica, Volume. 29, Issue s1, 216(2009)

Real-Time Surface Profile Measurement in a Laser Diode Interferometer Insensitive to Disturbance

He Guotian1,2,3、*, Zeng Zhi1, and Li Ming1
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    He Guotian, Zeng Zhi, Li Ming. Real-Time Surface Profile Measurement in a Laser Diode Interferometer Insensitive to Disturbance[J]. Acta Optica Sinica, 2009, 29(s1): 216

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    Received: --

    Accepted: --

    Published Online: Jun. 25, 2009

    The Author Email: He Guotian (slhgt@siom.ac.cn)

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology