Laser & Optoelectronics Progress, Volume. 61, Issue 9, 0923002(2024)
Parameter Identification of the MEMS Micromirror Model Based on Improved Least Squares Method
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Zirui Wang, Zhihui Feng, Ming Lei, Ze Wu. Parameter Identification of the MEMS Micromirror Model Based on Improved Least Squares Method[J]. Laser & Optoelectronics Progress, 2024, 61(9): 0923002
Category: Optical Devices
Received: Jan. 5, 2023
Accepted: Mar. 7, 2023
Published Online: May. 10, 2024
The Author Email: Zhihui Feng (fengzh@ioe.ac.cn)
CSTR:32186.14.LOP223403