Laser & Optoelectronics Progress, Volume. 61, Issue 9, 0923002(2024)

Parameter Identification of the MEMS Micromirror Model Based on Improved Least Squares Method

Zirui Wang1,2,3, Zhihui Feng1,2,3、*, Ming Lei1,2,3, and Ze Wu1,2,3
Author Affiliations
  • 1Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, Sichuan, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Key Laboratory of Science and Technology on Space Optoelectronic Precision Measurement, Chinese Academy of Sciences, Chengdu 610209, Sichuan, China
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    Zirui Wang, Zhihui Feng, Ming Lei, Ze Wu. Parameter Identification of the MEMS Micromirror Model Based on Improved Least Squares Method[J]. Laser & Optoelectronics Progress, 2024, 61(9): 0923002

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    Paper Information

    Category: Optical Devices

    Received: Jan. 5, 2023

    Accepted: Mar. 7, 2023

    Published Online: May. 10, 2024

    The Author Email: Zhihui Feng (fengzh@ioe.ac.cn)

    DOI:10.3788/LOP223403

    CSTR:32186.14.LOP223403

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