Parameter Identification of the MEMS Micromirror Model Based on Improved Least Squares Method

Zirui Wang; Zhihui Feng; Ming Lei; Ze Wu

doi:10.3788/LOP223403

Laser & Optoelectronics Progress, Volume. 61, Issue 9, 0923002(2024)

Parameter Identification of the MEMS Micromirror Model Based on Improved Least Squares Method

Zirui Wang^1,2,3, Zhihui Feng^1,2,3、*, Ming Lei^1,2,3, and Ze Wu^1,2,3

Author Affiliations

¹Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, Sichuan, China

²University of Chinese Academy of Sciences, Beijing 100049, China

³Key Laboratory of Science and Technology on Space Optoelectronic Precision Measurement, Chinese Academy of Sciences, Chengdu 610209, Sichuan, China

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Figures & Tables(11)

Fig. 1. Physical picture of the MEMS micromirror

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Fig. 2. Experimental plan

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Fig. 3. Experimental schematic

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Fig. 4. Input and output signal of the micromirror in the open-loop state. (a) Input signal; (b) output signal

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Fig. 5. Size of the correction gain matrix K in the identification process of the traditional recursive least squares algorithm.(a) $K (a_{1})$ ; (b) $K (a_{2})$ ; (c) $K (b_{1})$ ; (d) $K (b_{2})$

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Fig. 6. Size of the correction gain matrix K in the identification process of the proposed algorithm. (a) $K (a_{1})$ ; (b) $K (a_{2})$ ; (c) $K (b_{1})$ ; (d) $K (b_{2})$

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Fig. 7. Convergence procedure of the estimated parameter identification of the traditional recursive least squares algorithm.(a) $a_{1}$ ; (b) $a_{2}$ ; (c) $b_{1}$ ; (d) $b_{2}$

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Fig. 8. Convergence procedure of the estimated parameter identification of the proposed algorithm. (a) $a_{1}$ ; (b) $a_{2}$ ; (c) $b_{1}$ ; (d) $b_{2}$

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Table 1. Simulation results of parameter identification
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Table 1. Simulation results of parameter identification
Parameter $a_{1}$ $a_{2}$ $b_{1}$ $b_{2}$
Actual value 1.5358 0.7812 1.0000 0.5562
Improved algorithm 1.5337 0.7820 0.9998 0.5558
Traditional algorithm 1.5173 0.7619 0.9988 0.5397

Table 2. Parameters of the MEMS micromirror
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Table 2. Parameters of the MEMS micromirror
Parameter Value
Effective mirror size /mm 6
Optical scanning angle /［（°）×（°）］ 30×20
Working frequency Fast axis 1.2 kHz，slow axis 0‒800 Hz
Working voltage /V ±3

Table 3. Comparison of model validation errors between the improved algorithm and the traditional recursive least squares algorithm
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Table 3. Comparison of model validation errors between the improved algorithm and the traditional recursive least squares algorithm
Algorithm RMSE
30 Hz 60 Hz 90 Hz 130 Hz
Improved algorithm 0.01122 0.01125 0.01131 0.01189
Traditional algorithm 0.01228 0.01250 0.01260 0.01291

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Zirui Wang, Zhihui Feng, Ming Lei, Ze Wu. Parameter Identification of the MEMS Micromirror Model Based on Improved Least Squares Method[J]. Laser & Optoelectronics Progress, 2024, 61(9): 0923002

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