Laser & Optoelectronics Progress, Volume. 61, Issue 9, 0923002(2024)

Parameter Identification of the MEMS Micromirror Model Based on Improved Least Squares Method

Zirui Wang1,2,3, Zhihui Feng1,2,3、*, Ming Lei1,2,3, and Ze Wu1,2,3
Author Affiliations
  • 1Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, Sichuan, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Key Laboratory of Science and Technology on Space Optoelectronic Precision Measurement, Chinese Academy of Sciences, Chengdu 610209, Sichuan, China
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    Aiming at the problem of establishing the mathematical model of the electromagnetic-driven micro-electro-mechanical system (MEMS) micromirror applied to the laser radar, the discrete model of the electromagnetic-driven MEMS micromirror is established by combining the mechanism analysis method with the input-output method. A recursive least squares method with variable forgetting factor is proposed to identify the model parameters of electromagnetic-driven MEMS micromirror. By making the forgetting factor dynamic, the problem of "data saturation" is solved, so that as much input and output data as possible can play a role in parameter identification, and the accuracy of parameter identification is improved. Through the simulation and experimental verification of this method, the results show that the error of the model obtained by recursive least squares identification with variable forgetting factor is reduced by 9.2% compared with traditional recursive least squares identification.

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    Zirui Wang, Zhihui Feng, Ming Lei, Ze Wu. Parameter Identification of the MEMS Micromirror Model Based on Improved Least Squares Method[J]. Laser & Optoelectronics Progress, 2024, 61(9): 0923002

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    Paper Information

    Category: Optical Devices

    Received: Jan. 5, 2023

    Accepted: Mar. 7, 2023

    Published Online: May. 10, 2024

    The Author Email: Feng Zhihui (fengzh@ioe.ac.cn)

    DOI:10.3788/LOP223403

    CSTR:32186.14.LOP223403

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