Research on the Identification Process of Bare Silicon Wafers and Coated Wafers Based on 1 066 nm Fiber Laser

Shu Tianjiao; Zhang Lingling; Du Yuanchao; Li Guoqi; Chen Yuan; Zhou Wei; Ma Yongxin; Gao Yinrui; Hu Haowei; Chen Yu

doi:10.14128/j.cnki.al.20234304.100

APPLIED LASER, Volume. 43, Issue 4, 100(2023)

Research on the Identification Process of Bare Silicon Wafers and Coated Wafers Based on 1 066 nm Fiber Laser

Shu Tianjiao^1,2、*, Zhang Lingling^1,2, Du Yuanchao^1,2, Li Guoqi^1,2, Chen Yuan^1,2, Zhou Wei³, Ma Yongxin¹, Gao Yinrui⁴, Hu Haowei⁴, and Chen Yu⁴

Author Affiliations

¹[in Chinese]

²[in Chinese]

³[in Chinese]

⁴[in Chinese]

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References(3)

[1] [1] SCARONI J, MCKEE T. A close look at laser marking of silicon wafers［J］. Solid State Technology, 1997, 40: 245-251.

[2] [2] LAM Y C, ZHENG H Y, TJEUNG R T, et al. Seeing the invisible laser markings［J］. Journal of Physics D: Applied Physics, 2009, 42(4): 042004.

[4] [4] CHIBA T, KOMURA R, MORI A.Micropeak array in the scribe line on a wafer［C］//Proc SPIE 4088, First International Symposium on Laser Precision Microfabrication, SanJose:SPIE Press 2000, 4088: 389-392.

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Shu Tianjiao, Zhang Lingling, Du Yuanchao, Li Guoqi, Chen Yuan, Zhou Wei, Ma Yongxin, Gao Yinrui, Hu Haowei, Chen Yu. Research on the Identification Process of Bare Silicon Wafers and Coated Wafers Based on 1 066 nm Fiber Laser[J]. APPLIED LASER, 2023, 43(4): 100

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Paper Information

Category:

Received: Apr. 13, 2022

Accepted: --

Published Online: Nov. 17, 2023

The Author Email: Tianjiao Shu (179388@qq.com)

DOI:10.14128/j.cnki.al.20234304.100

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology