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Shu Tianjiao, Zhang Lingling, Du Yuanchao, Li Guoqi, Chen Yuan, Zhou Wei, Ma Yongxin, Gao Yinrui, Hu Haowei, Chen Yu. Research on the Identification Process of Bare Silicon Wafers and Coated Wafers Based on 1 066 nm Fiber Laser[J]. APPLIED LASER, 2023, 43(4): 100