Chinese Optics, Volume. 16, Issue 1, 61(2023)

Research progress of monolithic integration master-oscillation power-amplifiers

Man-qing TAN1,2、*, Dao-ming YOU1,2, Wen-tao GUO1, and Wei-hua LIU1,2
Author Affiliations
  • 1State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2College of Materials Science and Opto-electronics Technology, University of Chinese Academy of Sciences, Beijing 100049, China
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    Figures & Tables(16)
    (a) Three-dimensional structure and (b) planar structure of a tapered-MOPA
    Schematic diagram of double tapered laser. (a) Planar structure; (b) three-dimensional structure; (c) SEM profile of the surface grating; (d) top view of the SEM of surface grating; (e) periodic electric injection diagram[33]
    Structure diagram of a ridge-amplifier MOPA
    Structure diagram of a bent ridge-amplifier MOPA[35]
    Structure diagrams of grating-MOPA. (a) DBR; (b) DFB
    Structure diagram of a double DBR grating MOPA[47]
    Schematic diagram of the frequency doubling setup with a MOPA[50]
    Structure diagram of a MOPA with tapered grating[52]
    Structure diagram of three section MOPA
    MOPA-based external Cavity mode-locked laser[60]
    Diagram of separating electrode
    • Table 1. Structures, characteristics and problems of main MOPAs

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      Table 1. Structures, characteristics and problems of main MOPAs

      MOPA类型结构特征性能特征存在的问题
      锥形MOPA锥形放大器输出功率高整形耦合难度大
      脊型MOPA脊型放大器光束质量高输出功率低
      DBR-MOPADBR光栅窄线宽、输出功率高光栅工艺复杂
      DFB-MOPADFB光栅窄线宽、光束质量高光栅工艺复杂
      三段式MOPA集成控制器可调谐、多用途电流控制难度大
    • Table 2. Progress of high-power MOPA

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      Table 2. Progress of high-power MOPA

      Yearλ/nm P/W Key featureRefs.
      2010106412DFB ASLOC Embed[101]
      2011106012ASLOC6thDBR AR/AR [102]
      2016103012.7ASLOC3thDBR AR/AR [51]
      2017103015.5TQW ASLOC 7thDBR [94]
      2017103010.5ASLOC 7thDBR [93]
      20189807.3TPL PHC[84]
      201910609.5ASLOC 7thDBR [29]
      20219757TPL[97]
      20227857DBR TPL[103]
    • Table 3. Progress of MOPAs with a narrow linewidth

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      Table 3. Progress of MOPAs with a narrow linewidth

      Yearλ/nm Length/pmGrating featureRefs.
      20111 060<10DBR 6th surface [102]
      2015117810DBR 3th surface [10]
      2017103017DBR 7th surface [105]
      20199962.4DBR 44th surface [43]
      20199802.7DBR 44thsurface [33]
      20217851DBR 10th surface [53]
      202178319DBR 10th surface [52]
      202278519DBR TPL[103]
    • Table 4. Progress of MOPAs with high beam quality

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      Table 4. Progress of MOPAs with high beam quality

      Yearλ/nm M2/1/e2Key featureRefs.
      201010641.3DFB ASLOC Embed[101]
      20116601.5TPL DQW[108]
      201610301.2ASLOC 3thDBR AR/AR [51]
      201710301.1TQW ASLOC 7thDBR [105]
      201710301.2ASLOC 7thDBR AR/AR [93]
      2018980<2TPL PBC[84]
      20199801.5TPL PBC narrow angle[26]
      201910601.1ASLOC 7thDBR [109]
      20199961.6444thDFB ASLOC DQW [43]
      20199801.744thDFB ASLOC DQW [33]
      20219751.66TPL[97]
      202115501.26TPL noval package[110]
    • Table 5. Progress of MOPAs with high-brightness

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      Table 5. Progress of MOPAs with high-brightness

      Yearλ/nm Brightness/MWcm−2sr−1Key featureRefs.
      2010980155(matrix)ASLOC TPL[91]
      20111 060860(1/e2) TPL HR/AR[102]
      20161030770(1/e2) TQW ASLOC[51]
      20171030700(1/e2) TQW ASLOC[93]
      20171030170(matrix)DFB special structure[94]
      201898085.3(matrix)PHC TPL[84]
      2019980126.8(matrix)PHC narrow angle[85]
      2021975369(1/e2) TPL[97]
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    Man-qing TAN, Dao-ming YOU, Wen-tao GUO, Wei-hua LIU. Research progress of monolithic integration master-oscillation power-amplifiers[J]. Chinese Optics, 2023, 16(1): 61

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    Paper Information

    Category: Review

    Received: Feb. 7, 2022

    Accepted: --

    Published Online: Jul. 5, 2023

    The Author Email:

    DOI:10.37188/CO.2022-0022

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