Design and Fabrication of Antireflective Film for Weak Ripple Superluminescent Diode

Daoming You; Manqing Tan; Xiaofeng Guo; Wentao Guo; Yingchun Cao; Wenbin Chen

doi:10.3788/CJL220983

Chinese Journal of Lasers, Volume. 50, Issue 13, 1303101(2023)

Design and Fabrication of Antireflective Film for Weak Ripple Superluminescent Diode

Daoming You^1,2, Manqing Tan^1,2、*, Xiaofeng Guo¹, Wentao Guo¹, Yingchun Cao¹, and Wenbin Chen^1,3

¹State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

²College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China

³School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

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Daoming You, Manqing Tan, Xiaofeng Guo, Wentao Guo, Yingchun Cao, Wenbin Chen. Design and Fabrication of Antireflective Film for Weak Ripple Superluminescent Diode[J]. Chinese Journal of Lasers, 2023, 50(13): 1303101

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Paper Information

Category: Thin Films

Received: Jun. 21, 2022

Accepted: Aug. 26, 2022

Published Online: May. 29, 2023

The Author Email: Tan Manqing (mqtan@semi.ac.cn)

DOI:10.3788/CJL220983

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology