Chinese Optics Letters, Volume. 23, Issue 3, 033602(2025)

Fabrication of sub-diffraction limit high-aspect-ratio nanostructures via laser direct writing On the Cover

Guoliang Chen1, Houan Teng1, Jian Chen1, and Qiwen Zhan1,2,3、*
Author Affiliations
  • 1School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
  • 2Zhangjiang Laboratory, Shanghai 201204, China
  • 3International Institute for Sustainability with Knotted Chiral Meta Matter (WPI-SKCM2), Hiroshima University, Hiroshima 739-8526, Japan
  • show less
    Figures & Tables(6)
    (a) Schematic diagram illustrating the optical path in the LDW system. L1, L2, lenses; HWP, half-wave plate; PBS, polarizing beam splitter; S, shutter; BS, beam splitter; G, Glan-Thompson prism; OL, objective lens. (b) Schematic diagram of photoresist placement. (c) Schematic diagram of the HARL processing method.
    Experimental results of the fabricated HARLs with different lengths. (a) IP-L780 photoresist. (b) IP-Dip photoresist. The top and side views of the HARLs are shown in the top and bottom halves of (a) and (b), respectively.
    Experimental results of the fabricated HARLs with different pillar processing time. (a) 500 ms, (b) 700 ms, and (c) 900 ms.
    Experimental results of the fabricated HARLs with different direct writing speeds. (a) 200 µm/s, (b) 400 µm/s, and (c) 500 µm/s.
    (a) Experimental results of the fabricated HARLs with high LDW power (16 mW). (b) Experimental results of the fabricated HARLs with 90° polarization states.
    Experimental results of the fabricated HAR array microstructure. (a) The isolated HAR cell microstructure. (b) The array of the HAR microstructures. (c) The top view of the HAR array microstructure. (d) The side view of the HAR array microstructure.
    Tools

    Get Citation

    Copy Citation Text

    Guoliang Chen, Houan Teng, Jian Chen, Qiwen Zhan, "Fabrication of sub-diffraction limit high-aspect-ratio nanostructures via laser direct writing," Chin. Opt. Lett. 23, 033602 (2025)

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Nanophotonics, Metamaterials, and Plasmonics

    Received: Jun. 27, 2024

    Accepted: Apr. 9, 2024

    Posted: Sep. 4, 2024

    Published Online: Mar. 31, 2025

    The Author Email: Qiwen Zhan (qwzhan@usst.edu.cn)

    DOI:10.3788/COL202523.033602

    CSTR:32184.14.COL202523.033602

    Topics