Chinese Optics Letters, Volume. 13, Issue 4, 041405(2015)

Femtosecond Bessel-beam-assisted high-aspect-ratio microgroove fabrication in fused silica

Liangliang Zhao1, Feng Wang1, Lan Jiang1, Yongfeng Lu2, Weiwei Zhao1, Jun Xie1, and Xiaowei Li1、*
Author Affiliations
  • 1Laser Micro/Nano-Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
  • 2Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska 68588-0511, USA
  • show less
    References(24)

    [14] H. Jung, Y. Hwang, I. Hyeon, Y. Kim, C. Baek. Proceedings of the 3rd IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems, 1172(2008).

    CLP Journals

    [1] Zhi Luo, Cong Wang, Xinran Dong, Ji’an Duan, "Femtosecond laser highly-efficient plane processing based on an axicon-generated donut-shaped beam," Chin. Opt. Lett. 16, 031401 (2018)

    Cited By
    Tools

    Get Citation

    Copy Citation Text

    Liangliang Zhao, Feng Wang, Lan Jiang, Yongfeng Lu, Weiwei Zhao, Jun Xie, Xiaowei Li, "Femtosecond Bessel-beam-assisted high-aspect-ratio microgroove fabrication in fused silica," Chin. Opt. Lett. 13, 041405 (2015)

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Lasers and Laser Optics

    Received: Dec. 10, 2014

    Accepted: Feb. 12, 2015

    Published Online: Sep. 21, 2018

    The Author Email: Xiaowei Li (lixiaowei@bit.edu.cn)

    DOI:10.3788/COL201513.041405

    Topics