Femtosecond Bessel-beam-assisted high-aspect-ratio microgroove fabrication in fused silica

Liangliang Zhao; Feng Wang; Lan Jiang; Yongfeng Lu; Weiwei Zhao; Jun Xie; Xiaowei Li

doi:10.3788/COL201513.041405

Chinese Optics Letters, Volume. 13, Issue 4, 041405(2015)

Femtosecond Bessel-beam-assisted high-aspect-ratio microgroove fabrication in fused silica

Liangliang Zhao¹, Feng Wang¹, Lan Jiang¹, Yongfeng Lu², Weiwei Zhao¹, Jun Xie¹, and Xiaowei Li^1、*

¹Laser Micro/Nano-Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China

²Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska 68588-0511, USA

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Liangliang Zhao, Feng Wang, Lan Jiang, Yongfeng Lu, Weiwei Zhao, Jun Xie, Xiaowei Li, "Femtosecond Bessel-beam-assisted high-aspect-ratio microgroove fabrication in fused silica," Chin. Opt. Lett. 13, 041405 (2015)

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Paper Information

Category: Lasers and Laser Optics

Received: Dec. 10, 2014

Accepted: Feb. 12, 2015

Published Online: Sep. 21, 2018

The Author Email: Xiaowei Li (lixiaowei@bit.edu.cn)

DOI:10.3788/COL201513.041405

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology