Journal of Optoelectronics · Laser, Volume. 35, Issue 9, 987(2024)
Studies on the growth and physical properties of GaN thin films assisted by high-energy N plasma sources
[1] [1] XU L Y, XU Y, LUO A, et al. Microstructural and optical properties of stress-free GaN films on graphene prepared by PECVD[J]. Japanese Journal of Applied Physics, 2021, 60(3): 035502.
[2] [2] SANG X, XU Y, YIN M, et al. InGaN multiple quantum well based light-emitting diodes with indium composition gradient InGaN quantum barriers[J]. Optoelectronics Letters, 2024, 20(5): 89-93.
[4] [4] ZHANG G H, CHEN L C, WANG L, et al. Subnanometer-thick 2D GaN film with a large bandgap synthesized by plasma enhanced chemical vapor deposition[J]. Journal of Materials Chemistry A, 2022, 10(8): 4053-4059.
[5] [5] LUO S S, FU K, XIE Q Y, et al. Investigation of vertical GaN-on-GaN p-n diode with regrown p-GaN for operation in venus and other extreme environments[J]. Applied Physics Letters, 2023, 113(23): 243504.
[6] [6] TEO K H, ZHANG Y H, CHOWDHURY N, et al. Emerging GaN technologies for power, RF, digital, and quantum computing applications: recent advances and prospects[J]. Journal of Applied Physical, 2021, 130(16): 160902.
[7] [7] ZHANG H H, MISCHKE J, MERTIN W, et al. Graphene as a transparent conductive electrode in GaN-based LEDs[J]. Materials, 2022, 15(6): 2203.
[8] [8] NIU H D, YAO W Z, YANG S Y, et al. Effects of pressure on GaN growth in a specific warm-wall MOCVD reactor[J]. CrystEngComm, 2023, 25:1263-1269.
[9] [9] MAI T T, DAI J J, CHOU W C, et al. Improving optical and electrical characteristics of GaN films via 3D island to 2D growth mode transition using molecular beam epitaxy[J]. Coatings, 2024, 14(2): 191.
[10] [10] LEACH J H, UDWARY K, DODSON G, et al. Low-pressure, modified HVPE for chemically pure GaN epilayers[J]. Physica Status Solidi B, 2024, 261(3): 2400035.
[11] [11] ZHANG Y X, CHEN Z Y, ZHANG K T, et al. Laser-assisted metal-organic chemical vapor deposition of GaN[J]. Physica Status Solidi-Rapid Research Letters, 2021, 15(6): 2100202.
[12] [12] YADAV G J, GUPTA R, SHARMA A, et al. Optical properties of LMBE grown c-axis oriented GaN thin films using surface plasmon resonance technique[J]. Optical Materials, 2022, 131:112603.
[13] [13] ZHANG L, WANG Z R, WU J J, et al. Crystalline orientation and anisotropy of semi-polar GaN films grown on m-sapphire substrate by hydride vapor phase epitaxy[J]. Journal of Crystal Growth, 2022, 596:126824.
[14] [14] MONISH M, MOHAN S, SUTAR D S, et al. Gallium nitride films of high n-type conductivity grown by reactive sputtering[J]. Semiconductor Science and Technology, 2020, 35(4): 045011.
[15] [15] GUI Y, YANG L, TIAN K, et al. P-type Co3O4 nanoarrays decorated on the surface of n-type flower-like WO3 nanosheets for high-performance gas sensing[J]. Sensors and Actuators B: Chemical, 2019, 288:104-112.
[16] [16] KIM S H, JO C H, BAE M S, et al. Low temperature processed CO2 laser-assisted RF-sputtered GaN thin film for wide bandgap semiconductors[J]. Journal of Asian Ceramic Societies, 2023, 11(1): 68-79.
[19] [19] MA Y, CHEN T, ZHANG X, et al. High-photoresponsivity self-powered -, -, and -Ga2O3/p-GaN heterojunction UV photodetectors with an in situ GaON layer by MOCVD[J]. ACS Applied Materials and Interfaces, 2022, 14(30): 35194-35204.
[20] [20] WANG J, WANG X D, CHEN J F, et al. Investigation on minority carrier lifetime, diffusion length and recombination mechanism of Mg-doped GaN grown by MOCVD[J]. Journal of Alloys and Compounds, 2021, 870:159477.
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HU Haizheng, HE Huaile, LAI Li, WANG Shunli, WU Chao, GUO Daoyou. Studies on the growth and physical properties of GaN thin films assisted by high-energy N plasma sources[J]. Journal of Optoelectronics · Laser, 2024, 35(9): 987
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Received: Feb. 1, 2024
Accepted: Dec. 20, 2024
Published Online: Dec. 20, 2024
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