Journal of Optoelectronics · Laser, Volume. 35, Issue 9, 987(2024)

Studies on the growth and physical properties of GaN thin films assisted by high-energy N plasma sources

HU Haizheng, HE Huaile, LAI Li, WANG Shunli, WU Chao, and GUO Daoyou
Author Affiliations
  • School of Science, Zhejiang Sci Tech University, Hangzhou, Zhejiang 310018, China
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    References(17)

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    HU Haizheng, HE Huaile, LAI Li, WANG Shunli, WU Chao, GUO Daoyou. Studies on the growth and physical properties of GaN thin films assisted by high-energy N plasma sources[J]. Journal of Optoelectronics · Laser, 2024, 35(9): 987

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    Paper Information

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    Received: Feb. 1, 2024

    Accepted: Dec. 20, 2024

    Published Online: Dec. 20, 2024

    The Author Email:

    DOI:10.16136/j.joel.2024.09.0067

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