Journal of Optoelectronics · Laser, Volume. 35, Issue 9, 987(2024)
Studies on the growth and physical properties of GaN thin films assisted by high-energy N plasma sources
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HU Haizheng, HE Huaile, LAI Li, WANG Shunli, WU Chao, GUO Daoyou. Studies on the growth and physical properties of GaN thin films assisted by high-energy N plasma sources[J]. Journal of Optoelectronics · Laser, 2024, 35(9): 987
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Received: Feb. 1, 2024
Accepted: Dec. 20, 2024
Published Online: Dec. 20, 2024
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