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Chinese Journal of Lasers, Volume. 37, Issue 12, 3007(2010)

Performance Analysis of Double-Fluid-Layer Achromatic ArF Immersion Interference Lithography

Zhou Yuan1、* and Li Yanqiu2
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    Zhou Yuan, Li Yanqiu. Performance Analysis of Double-Fluid-Layer Achromatic ArF Immersion Interference Lithography[J]. Chinese Journal of Lasers, 2010, 37(12): 3007

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    Received: Apr. 6, 2010

    Accepted: --

    Published Online: Mar. 12, 2014

    The Author Email: Yuan Zhou (zhouyuan304@163.com)

    DOI:10.3788/cjl20103712.3007

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology