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Infrared and Laser Engineering, Volume. 54, Issue 3, 20240502(2025)

Investigation of diffraction characteristics in stitched atomic lithography grating

Yize WU1, Dongbai XUE2,3,4,5,6,7、*, Guangxu XIAO2,3,4,5,6,7, Junyu SHEN2,3,4,5,6,7, Xiao DENG2,3,4,5,6,7, and Ming KONG1
Author Affiliations
  • 1College of Metrology & Measurement Instrumentation, China Jiliang University, Hangzhou 310018, China
  • 2National Metrology and Testing Center for Integrated Circuit Measurement and Inspection Equipment Industry (Shanghai), Tongji University, Shanghai 200092, China
  • 3Institute of Precision Optical Engineering, Tongji University, Shanghai 200092, China
  • 4MOE Key Laboratory of Advanced Micro-Structured Materials, Tongji University, Shanghai 200092, China
  • 5Shanghai Frontiers Science Center of Digital Optics, Tongji University, Shanghai 200092, China
  • 6Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications, Tongji University, Shanghai 200092, China
  • 7School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
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    [2] LIU M, GONG B. A three-dimensional laser interferometer gravitational-wave detector[J]. Scientific Reports, 10, 16285(2020).

    [3] XIONG Z, KUNWAR P, SOMAN P. Hydrogel-based diffractive optical elements (hDOEs) using rapid digital photopatterning[J]. Advanced Optical Materials, 9, 2001217(2021).

    [4] YIN Y, LIU L, BAI Y et al. Littrow 3D measurement based on 2D grating dual-channel equal-optical path interference[J]. Optics Express, 30, 41671-41684(2022).

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    [10] YIN Y, LIU Z, JIANG S et al. High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving[J]. Optics and Lasers in Engineering, 158, 107167(2022).

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    [15] DENG X, TAN W, TANG Z et al. Scanning and splicing atom lithography for self-traceable nanograting fabrication[J]. Nanomanufacturing and Metrology, 5, 179-187(2022).

    [16] LIANG L, LIU L, GUAN Y. Analysis and study of the diffraction efficiency of self-traceable grating[J]. Infrared and Laser Engineering, 52, 20230356-307(2023).

    [17] DENG X, DAI G, LIU J et al. A new type of nanoscale reference grating manufactured by combined laser-focused atomic deposition and X-ray interference lithography and its use for calibrating a scanning electron microscope[J]. Ultramicroscopy, 226, 113293(2021).

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    Yize WU, Dongbai XUE, Guangxu XIAO, Junyu SHEN, Xiao DENG, Ming KONG. Investigation of diffraction characteristics in stitched atomic lithography grating[J]. Infrared and Laser Engineering, 2025, 54(3): 20240502

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    Paper Information

    Category: 光电测量

    Received: Nov. 5, 2024

    Accepted: --

    Published Online: Apr. 8, 2025

    The Author Email: Dongbai XUE (xuedb@tongji.edu.cn)

    DOI:10.3788/IRLA20240502

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology