Chinese Journal of Lasers, Volume. 49, Issue 10, 1002503(2022)
High-Aspect-Ratio Photonic-Crystal Structure of Lithium Niobate Fabricated via Femtosecond Bessel Beam Direct Writing
[1] Ebbesen T W, Lezec H J, Ghaemi H F et al. Extraordinary optical transmission through sub-wavelength hole arrays[J]. Nature, 391, 667-669(1998).
[2] Lezec H J, Degiron A, Devaux E et al. Beaming light from a subwavelength aperture[J]. Science, 297, 820-822(2002).
[3] Akahane Y, Asano T, Song B S et al. High-Q photonic nanocavity in a two-dimensional photonic-crystal[J]. Nature, 425, 944-947(2003).
[4] Gailevičius D, Purlys V, Staliunas K. Photonic crystal spatial filters fabricated by femtosecond pulsed Bessel beam[J]. Optics Letters, 44, 4969-4972(2019).
[5] Du J H, Song W, Zhang H J. Advances in three-dimensional quasi-phase matching[J]. Chinese Journal of Lasers, 48, 1208001(2021).
[6] Chen F. Photonic guiding structures in lithium niobate crystals produced by energetic ion beams[J]. Journal of Applied Physics, 106, 081101(2009).
[7] Si G Y, Danner A J, Teo S L et al. Photonic crystal structures with ultrahigh aspect ratio in lithium niobate fabricated by focused ion beam milling[J]. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 29, 021205(2011).
[8] Zhao Q Z, Zhang D L. Transmission spectral characteristics of photonic-crystals milled in annealed proton-exchange LiNbO3 waveguide[J]. Chinese Physics Letters, 34, 034207(2017).
[9] He F, Cheng Y. Femtosecond laser micromachining: frontier in laser precision micromachining[J]. Chinese Journal of Lasers, 34, 595-622(2007).
[10] Liu H G, Lin W X, Hong M H. Hybrid laser precision engineering of transparent hard materials: challenges, solutions and applications[J]. Light: Science & Applications, 10, 162(2021).
[11] Lin Z Y, Hong M H. Femtosecond laser precision engineering: from micron, submicron, to nanoscale[J]. Ultrafast Science, 2021, 1-22(2021).
[12] Zhou C, Ma J N, Xu X Y et al. Femtosecond laser processing of lithium niobate crystal: principle and applications[J]. Progress in Physics, 40, 69-83(2020).
[13] Jia Y C, Wang S X, Chen F. Femtosecond laser direct writing of flexibly configured waveguide geometries in optical crystals: fabrication and application[J]. Opto-Electronic Advances, 3, 190042(2020).
[14] Liao Y, Xu J, Sun H Y et al. Fabrication of microelectrodes deeply embedded in LiNbO3 using a femtosecond laser[J]. Applied Surface Science, 254, 7018-7021(2008).
[15] He R Y, An Q, Jia Y C et al. Femtosecond laser micromachining of lithium niobate depressed cladding waveguides[J]. Optical Materials Express, 3, 1378-1384(2013).
[16] Li J Q, Yan J F, Li X et al. Research advancement on ultrafast laser microprocessing of transparent dielectrics[J]. Chinese Journal of Lasers, 48, 0202019(2021).
[17] Du K, Li X W, Yang B D et al. Research progress of femtosecond laser microhole drilling on non-metallic materials[J]. Laser & Optoelectronics Progress, 57, 111417(2020).
[18] Durnin J, Miceli J, Jr, Eberly J H. Diffraction-free beams[J]. Journal of the Optical Society of America A, 3, 128(1986).
[19] Polesana P, Franco M, Couairon A et al. Filamentation in Kerr media from pulsed Bessel beams[J]. Physical Review A, 77, 043814(2008).
[20] Wei Z F, Sun C, Guo K et al. Study on Bessel lens for picosecond laser cutting[J]. Acta Photonica Sinica, 49, 1022001(2020).
[21] Hu M N, Ge L C, Zhang J P et al. Hole-drilling with high depth-diameter ratio using multi-pulse femtosecond laser[J]. Chinese Journal of Lasers, 43, 0403006(2016).
[22] Xie Q, Li X W, Jiang L et al. High-aspect-ratio,high-quality microdrilling by electron density control using a femtosecond laser Bessel beam[J]. Applied Physics A, 122, 136(2016).
[23] Yang Z Q, Duan J, Chen H et al. Chemically strengthened glass fabricated by picosecond Bessel beam cutting[J]. Chinese Journal of Lasers, 46, 1102010(2019).
[24] Duocastella M, Arnold C B. Bessel and annular beams for materials processing[J]. Laser & Photonics Reviews, 6, 607-621(2012).
[25] Ma R, Ji L F, Yan T Y et al. Influence of ambient gases on plasma dynamics of ultrafast laser-induced filamentation in sapphires[J]. Optics Express, 28, 20461-20472(2020).
[26] Yan T Y, Ji L F, Sun W G. Characteristics and formation mechanism of filamentary plasma string induced by single picosecond laser pulse in sapphire[J]. Applied Physics A, 128, 39(2021).
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Weigao Sun, Lingfei Ji, Jincan Zheng, Yanan Wen, Guanqiang Wang. High-Aspect-Ratio Photonic-Crystal Structure of Lithium Niobate Fabricated via Femtosecond Bessel Beam Direct Writing[J]. Chinese Journal of Lasers, 2022, 49(10): 1002503
Received: Jan. 10, 2022
Accepted: Feb. 15, 2022
Published Online: May. 12, 2022
The Author Email: Ji Lingfei (ncltji@bjut.edu.cn)