Chinese Journal of Lasers, Volume. 49, Issue 10, 1002503(2022)

High-Aspect-Ratio Photonic-Crystal Structure of Lithium Niobate Fabricated via Femtosecond Bessel Beam Direct Writing

Weigao Sun1,2, Lingfei Ji1,2、*, Jincan Zheng1,2, Yanan Wen1,2, and Guanqiang Wang1,2
Author Affiliations
  • 1Institute of Laser Engineering, Faculty of Materials and Manufacturing, Beijing University of Technology, Beijing 100124, China
  • 2Key Laboratory of Trans-Scale Laser Manufacturing Technology of Ministry of Education, Beijing University of Technology, Beijing 100124, China
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    Figures & Tables(6)
    Sketch of femtosecond Bessel beam direct writing device (LN:LiNbO3)
    Schematic of microholes array fabrication
    Influence of average laser power on microholes morphological characteristics. (a)(d) Images of microhole entrance and corresponding cross-section at average laser power of 0.29, 0.62, 0.76, and 1.14 mW, respectively; (e) influence of average laser power on entrance diameter and average diameter of microhole; (f) influence of average laser power on depth and aspect ratio of microhole
    Simulation of intensity distribution of Bessel beam after focusing
    Influence of relative position of Bessel beam focus area and material on microhole morphology
    Femtosecond Bessel beam direct write periodic microhole arrays. (a) Optical microscope image of photonic-crystal based on microhole array; (b) optical microscope image and corresponded SEM image of microhole cross-section; (c) schematic of filtering performance test of photonic-crystal (the double arrows in the figure indicate polarization direction of the light); (d) test result of photonic-crystal filtering performance; (e) transmission spectra of photonic-crystal sample
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    Weigao Sun, Lingfei Ji, Jincan Zheng, Yanan Wen, Guanqiang Wang. High-Aspect-Ratio Photonic-Crystal Structure of Lithium Niobate Fabricated via Femtosecond Bessel Beam Direct Writing[J]. Chinese Journal of Lasers, 2022, 49(10): 1002503

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    Paper Information

    Received: Jan. 10, 2022

    Accepted: Feb. 15, 2022

    Published Online: May. 12, 2022

    The Author Email: Ji Lingfei (ncltji@bjut.edu.cn)

    DOI:10.3788/CJL202249.1002503

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