[1] Schulz G, Schwider J. Precise measurement of plainness[J]. Applied Optics, 6, 1077-1084(1967).

[2] Schulz G. Absolute flatness testing by an extended rotation method using two angles of rotation[J]. Applied Optics, 32, 1055-1059(1993).

[3] Fritz B S. Absolute calibration of an optical flat[J]. Optics Engineering, 23, 379-383(1984).

[4] Ai C, Wyant J C. Absolute testing of flats decomposed to even and odd function[C]. SPIE, 1776, 73-83(1992).

[5] Evans C J, Kestner R N. Test optics error removal[J]. Applied Optics, 35, 1015-1021(1996).

[6] Jia X, Xing T W, Wei H M et al. Analysis and simulation of absolute test of flats decomposed to even and odd functions[J]. Infrared and Laser Engineering, 41, 500-505(2012).

[7] Küchel M F. A new approach to solve the three flat problem[J]. Optik-International Journal for Light and Electron Optics, 112, 381-391(2001).

[8] Griesmann U. Three-flat test solution based on simple mirror symmetry[J]. Applied Optics, 45, 5856-5865(2006).

[9] Vannoni M. Absolute flatness measurement using oblique incidence setup and an iterative algorithm[J]. Optics Express, 22, 3538-3546(2014).

[10] Liu H H. Study of absolute measurement method of optical plane based on rotating in N positions[D]. Nanjing: Nanjing University of Science and Technology(2016).

[11] Yang L L. Measurement of diffraction efficiency for multi-layer diffractive optical elements with oblique incidence[J]. Acta Optica Sinica, 37, 0205003(2017).

[12] Xu L B, Zhou Y, Zhu R H et al. Research progress of wavefront error detection technology for meter-size optical elements in inertial confinement fusion system[J]. Laser & Optoelectronic Progress, 53, 120001(2016).

[13] Shi Y P, Liu C L. Positioning accuracy improvement of spot centroid for Shack-Hartmann wavefront sensor[J]. Laser & Optoelectronic Progress, 54, 081201(2017).

[14] Xiang Y, Li K Y, Wang W et al. Analysis of surface distortion of large aperture ultra-thin crystals and exploration of new clamping method with low stress[J]. Chinese Journal of Lasers, 44, 0208001(2017).

[15] Liu X M. Absolute testing of the optical flatness[D]. Nanjing: Nanjing University of Science and Technology(2004).