Simulation and Experimental Study of Absolute Measurement Method for Optical Surface

Shi Meng; Shijie Liu; Lei Chen; You Zhou; Yunbo Bai

doi:10.3788/LOP55.051201

Laser & Optoelectronics Progress, Volume. 55, Issue 5, 051201(2018)

Simulation and Experimental Study of Absolute Measurement Method for Optical Surface

Shi Meng^{1,2、1; 2;}, Shijie Liu^1、2;, Lei Chen^1、1;, You Zhou^1、2;, and Yunbo Bai^1、2;

¹ Key Laboratory of High Laser Materials, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

¹ School of Electronic Engineering and Optoelectronic Technology, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, China

² Key Laboratory of High Laser Materials, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

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Figures & Tables(19)

Fig. 1. Measurement principle of N bit rotation average detection method

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Fig. 2. Measurement principle of oblique incidence iteration absolute detection method

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Fig. 3. Initial surfaces used in simulation experiment. (a) A; (b) B; (c) C

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Fig. 4. Simulation results obtained by N bit rotation average method. (a) A; (b) B; (c) C

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Fig. 5. Residual data between the wavefront recovered by N bit rotation average method and original wavefront. (a) A; (b) B; (c) C

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Fig. 6. Simulation results obtained by oblique incidence iteration absolute detection method. (a) K; (b) M; (c) L

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Fig. 7. Residual data between the wavefront recovered by oblique incidence iteration absolute detection method and original wavefront. (a) K; (b) M; (c) L

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Fig. 8. Simulation results obtained by oblique incidence odd oven function absolute detection method. (a) K; (b) M; (c) L

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Fig. 9. Residual data between the wavefront recovered by oblique incidence odd oven function absolute detection method and original wavefront. (a) K; (b) M; (c) L

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Fig. 10. Experimental setup for N bit rotation absolute detection

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Fig. 11. Surface result of standard mirror A obtained by N bit rotation average method

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Fig. 12. Experimental setup for oblique incidence absolute detection

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Fig. 13. Surface results of L obtained by different methods. (a) Iteration method; (b) odd oven function method

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Fig. 14. Relative surface measurement result of standard mirror A

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Table 1. PV and RMS data of the initial surfaces
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Table 1. PV and RMS data of the initial surfaces
Surface A B C
PV /λ 0.042587 0.046494 0.043457
RMS /nm 4.9632 5.1474 4.1835

Table 2. PV and RMS data of the recovered surfaces obtained by N bit rotation average method
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Table 2. PV and RMS data of the recovered surfaces obtained by N bit rotation average method
Surface A B C
PV /λ 0.043511 0.048728 0.043658
RMS /nm 4.9382 5.1183 4.1323

Table 3. PV and RMS data of the recovered surfaces obtained by oblique incidence iteration absolute detection method
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Table 3. PV and RMS data of the recovered surfaces obtained by oblique incidence iteration absolute detection method
Surface K M L
PV /λ 0.038772 0.050428 0.043772
RMS /nm 4.2616 5.236 4.1736

Table 4. PV and RMS data of the recovered surfaces obtained by oblique incidence odd oven function absolute detection method
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Table 4. PV and RMS data of the recovered surfaces obtained by oblique incidence odd oven function absolute detection method
Surface K M L
PV /λ 0.038772 0.050428 0.031388
RMS /nm 4.2616 5.236 2.7548

Table 5. PV and RMS data of the surface of standard mirror A obtained by different methods
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Table 5. PV and RMS data of the surface of standard mirror A obtained by different methods
Method N bit rotation average method Iteration method Odd oven function method Relative measurement
PV /λ 0.025 0.030 0.023 0.038
RMS /nm 3.246 3.917 2.986 5.768

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Shi Meng, Shijie Liu, Lei Chen, You Zhou, Yunbo Bai. Simulation and Experimental Study of Absolute Measurement Method for Optical Surface[J]. Laser & Optoelectronics Progress, 2018, 55(5): 051201

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Paper Information

Category: Instrumentation, measurement, and metrology

Received: Oct. 19, 2017

Accepted: --

Published Online: Sep. 11, 2018

The Author Email: Liu Shijie (hsyliu@163.com)

DOI:10.3788/LOP55.051201

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. PV and RMS data of the initial surfaces

Table 1. PV and RMS data of the initial surfaces

Table 2. PV and RMS data of the recovered surfaces obtained by N bit rotation average method

Table 2. PV and RMS data of the recovered surfaces obtained by N bit rotation average method

Table 3. PV and RMS data of the recovered surfaces obtained by oblique incidence iteration absolute detection method

Table 3. PV and RMS data of the recovered surfaces obtained by oblique incidence iteration absolute detection method

Table 4. PV and RMS data of the recovered surfaces obtained by oblique incidence odd oven function absolute detection method

Table 4. PV and RMS data of the recovered surfaces obtained by oblique incidence odd oven function absolute detection method

Table 5. PV and RMS data of the surface of standard mirror A obtained by different methods

Table 5. PV and RMS data of the surface of standard mirror A obtained by different methods